JPS6176427U - - Google Patents

Info

Publication number
JPS6176427U
JPS6176427U JP16177984U JP16177984U JPS6176427U JP S6176427 U JPS6176427 U JP S6176427U JP 16177984 U JP16177984 U JP 16177984U JP 16177984 U JP16177984 U JP 16177984U JP S6176427 U JPS6176427 U JP S6176427U
Authority
JP
Japan
Prior art keywords
mirror
donut
optical axis
disposed
pellicle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16177984U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16177984U priority Critical patent/JPS6176427U/ja
Publication of JPS6176427U publication Critical patent/JPS6176427U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Description

【図面の簡単な説明】
図面は本考案の一実施例を示し、第1図は投影
機の略体正面断面図、第2図は併合反射ミラー取
付部の拡大断面図、第3図は従来の投影機の略体
正面断面図である。 1…投影機、2…照明光学系、3…投影光学系
、18…併合反射ミラー、19…ドーナツミラー
、19a…中央孔、20…鏡面、21…ペリクル
ミラー、22…枠部材、23…薄膜。

Claims (1)

    【実用新案登録請求の範囲】
  1. 照明用光軸と投影用光軸との合成点に配設する
    併合反射ミラーであつて、該合成点には基準とな
    るドーナツミラーを配設するとともに、このドー
    ナツミラーの背面側には枠部材に薄膜を張着した
    ペリクルミラーを跳上げ機構に連繋したペリクル
    ミラー支基を介して前記ドーナツミラーの背面に
    重合・離隔可能に設けたことを特徴とする投影機
    における併合反射ミラー。
JP16177984U 1984-10-24 1984-10-24 Pending JPS6176427U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16177984U JPS6176427U (ja) 1984-10-24 1984-10-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16177984U JPS6176427U (ja) 1984-10-24 1984-10-24

Publications (1)

Publication Number Publication Date
JPS6176427U true JPS6176427U (ja) 1986-05-22

Family

ID=30719677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16177984U Pending JPS6176427U (ja) 1984-10-24 1984-10-24

Country Status (1)

Country Link
JP (1) JPS6176427U (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5332032B1 (ja) * 1971-04-23 1978-09-06
JPS5863912A (ja) * 1981-10-12 1983-04-16 Olympus Optical Co Ltd 落射明暗視野照明装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5332032B1 (ja) * 1971-04-23 1978-09-06
JPS5863912A (ja) * 1981-10-12 1983-04-16 Olympus Optical Co Ltd 落射明暗視野照明装置

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