JPS6178287U - - Google Patents

Info

Publication number
JPS6178287U
JPS6178287U JP16442284U JP16442284U JPS6178287U JP S6178287 U JPS6178287 U JP S6178287U JP 16442284 U JP16442284 U JP 16442284U JP 16442284 U JP16442284 U JP 16442284U JP S6178287 U JPS6178287 U JP S6178287U
Authority
JP
Japan
Prior art keywords
suction
discharge
ports
pump
piezoelectric vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16442284U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16442284U priority Critical patent/JPS6178287U/ja
Publication of JPS6178287U publication Critical patent/JPS6178287U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)

Description

【図面の簡単な説明】
第１図は本考案ポンプの第１実施例の要部を断
面で示した断面図、第２図は第２実施例を示す斜
視図、第３図は第３実施例を示す斜視図である。 ２……板状マニホールド、３，４……吸込、吐
出配管連結口、５，６……吸込、吐出配管、７ａ
，７ｂ……吸込口、８ａ，８ｂ……吐出口、９ａ
，９ｂ……平板状圧電振動子ポンプ、１１ａ，１
１ｂ……吸込口突端部、１２ａ，１２ｂ……吐出
口突端部、１３……ネジ類、２６……環状パツキ
ン。

Claims (1)

    【実用新案登録請求の範囲】
  1. 吸込、吐出配管にそれぞれ連結された吸込、吐
    出配管連結口と、複数個の吸込口及び複数個の吐
    出口とを備えた板状マニホールドの各吸込口及び
    各吐出口に、それぞれ複数個の平板状圧電振動子
    ポンプの各吸込口突端部及び各吐出口突端部を密
    封嵌挿して複数個の平板状圧電振動子ポンプを連
    結し、板状マニホールドに当該各ポンプをネジ類
    で着脱自在に取り付けてなることを特徴とするポ
    ンプ。
JP16442284U 1984-10-29 1984-10-29 Pending JPS6178287U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16442284U JPS6178287U (ja) 1984-10-29 1984-10-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16442284U JPS6178287U (ja) 1984-10-29 1984-10-29

Publications (1)

Publication Number Publication Date
JPS6178287U true JPS6178287U (ja) 1986-05-26

Family

ID=30722283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16442284U Pending JPS6178287U (ja) 1984-10-29 1984-10-29

Country Status (1)

Country Link
JP (1) JPS6178287U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014037799A (ja) * 2012-08-16 2014-02-27 Ulvac Japan Ltd 往復動式ポンプ
US20220056900A1 (en) * 2019-06-27 2022-02-24 Murata Manufacturing Co., Ltd. Pump device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014037799A (ja) * 2012-08-16 2014-02-27 Ulvac Japan Ltd 往復動式ポンプ
US20220056900A1 (en) * 2019-06-27 2022-02-24 Murata Manufacturing Co., Ltd. Pump device
US12180954B2 (en) * 2019-06-27 2024-12-31 Murata Manufacturing Co., Ltd. Piezoelectric pump casing and space arrangement

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