JPS6178352U - - Google Patents
Info
- Publication number
- JPS6178352U JPS6178352U JP15983284U JP15983284U JPS6178352U JP S6178352 U JPS6178352 U JP S6178352U JP 15983284 U JP15983284 U JP 15983284U JP 15983284 U JP15983284 U JP 15983284U JP S6178352 U JPS6178352 U JP S6178352U
- Authority
- JP
- Japan
- Prior art keywords
- memory access
- direct memory
- abnormal termination
- circuit
- control circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000609 electron-beam lithography Methods 0.000 claims description 2
- 230000002159 abnormal effect Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
- 238000001459 lithography Methods 0.000 description 1
Landscapes
- Bus Control (AREA)
Description
第１図は電子線描画装置制御部と描画装置との
関係を示すブロツク図、第２図はＤＭＡ制御回路
のブロツク図、第３図は終了報告情報の例を示す
図である。
１…主記憶部、２…プロセツサ、３…システム
バス、４…ＤＭＡ制御回路、５…ＣＥ、６…描画
装置。
FIG. 1 is a block diagram showing the relationship between the electron beam lithography apparatus control section and the lithography apparatus, FIG. 2 is a block diagram of the DMA control circuit, and FIG. 3 is a diagram showing an example of completion report information. DESCRIPTION OF SYMBOLS 1... Main memory part, 2... Processor, 3... System bus, 4... DMA control circuit, 5... CE, 6... Drawing device.
Claims (1)
データ転送において、正常終了か異常終了かを判
別する回路をもち、異常終了時のみ、異常終了詳
細情報を報告することを特徴とするダイレクトメ
モリアクセス制御回路。 A direct memory access control circuit comprising a circuit for determining whether the direct memory access data is terminated normally or abnormally in transferring data to an electron beam lithography apparatus, and reporting detailed information on the abnormal termination only in the case of abnormal termination.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15983284U JPS6178352U (en) | 1984-10-24 | 1984-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15983284U JPS6178352U (en) | 1984-10-24 | 1984-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6178352U true JPS6178352U (en) | 1986-05-26 |
Family
ID=30717778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15983284U Pending JPS6178352U (en) | 1984-10-24 | 1984-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6178352U (en) |
-
1984
- 1984-10-24 JP JP15983284U patent/JPS6178352U/ja active Pending
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