JPS6181143U - - Google Patents
Info
- Publication number
- JPS6181143U JPS6181143U JP1984166221U JP16622184U JPS6181143U JP S6181143 U JPS6181143 U JP S6181143U JP 1984166221 U JP1984166221 U JP 1984166221U JP 16622184 U JP16622184 U JP 16622184U JP S6181143 U JPS6181143 U JP S6181143U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- fasteners
- mounting plate
- wahachiakku
- stopper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning In General (AREA)
Description
第１図は、本考案の実施例を示す正面図、第２
図は第１図の−線断面図である。
１…チヤツク取付板、３…チヤツク本体、７，
８…締付具、９，１０…ねじ。
Figure 1 is a front view showing an embodiment of the present invention, Figure 2 is a front view showing an embodiment of the present invention;
The figure is a sectional view taken along the line -- in FIG. 1...chuck mounting plate, 3...chuck body, 7,
8... Fastener, 9, 10... Screw.
Claims (1)
ル状の締付具を互に対向せしめて、ボルトで取り
付け、該締付具にチヤツク本体を嵌合したことを
特徴とするウエハチヤツク。 ２ チヤツク取付板の一側にストツパが設けられ
ていることを特徴とするウエハチヤツク。[Scope of Claim for Utility Model Registration] 1. Fasteners with angled cross-sections are attached to the upper and lower edges of the chuck mounting plate, facing each other, with bolts, and the chuck body is fitted to the fasteners. The characteristic wahachiakku. 2. A wafer chuck characterized in that a stopper is provided on one side of the chuck mounting plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984166221U JPS6181143U (en) | 1984-11-01 | 1984-11-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984166221U JPS6181143U (en) | 1984-11-01 | 1984-11-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6181143U true JPS6181143U (en) | 1986-05-29 |
Family
ID=30724048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984166221U Pending JPS6181143U (en) | 1984-11-01 | 1984-11-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6181143U (en) |
-
1984
- 1984-11-01 JP JP1984166221U patent/JPS6181143U/ja active Pending