JPS6184833U - - Google Patents

Info

Publication number
JPS6184833U
JPS6184833U JP17016584U JP17016584U JPS6184833U JP S6184833 U JPS6184833 U JP S6184833U JP 17016584 U JP17016584 U JP 17016584U JP 17016584 U JP17016584 U JP 17016584U JP S6184833 U JPS6184833 U JP S6184833U
Authority
JP
Japan
Prior art keywords
case
hole
guide hole
spacer
upper plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17016584U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17016584U priority Critical patent/JPS6184833U/ja
Publication of JPS6184833U publication Critical patent/JPS6184833U/ja
Pending legal-status Critical Current

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  • Measuring Fluid Pressure (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の一実施例を示す力センサの組
み立て断面図、第2図は従来の力センサの断面図
である。 図において、1はシリコンダイヤフラム型セン
サ素子、2は台3及び7は台座、4及び13は加
圧棒、5及び8はケース、6は弾性体、9は は
めあい穴、10は案内穴、11はスペーサ、12
は上板、14はコイルばねである。
FIG. 1 is an assembled sectional view of a force sensor showing an embodiment of the present invention, and FIG. 2 is a sectional view of a conventional force sensor. In the figure, 1 is a silicon diaphragm type sensor element, 2 is a base 3 and 7 is a base, 4 and 13 are pressure rods, 5 and 8 are cases, 6 is an elastic body, 9 is a fitting hole, 10 is a guide hole, and 11 is a spacer, 12
is an upper plate, and 14 is a coil spring.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] シリコンダイヤフラム型センサ素子を取り付け
た台と、この台を挿入した台座と、内側一端に前
記台座の外周が挿入されるはめあい穴を有し、他
端は前記はめあい穴より小さい案内穴を有するケ
ースと、前記ケースの案内穴より大きい穴を有す
るスペーサと、前記ケースの案内穴より小さい穴
を有し、かつ前記スペーサより厚い上板と、中央
部が前記ケースの案内穴をスライドする同等の形
状のストレート部を有し、かつ一端が針先形状で
他端が前記上板の穴と同等の形状を有する加圧棒
と、前記ケースの案内穴より小さくかつ前記台の
外形より大きい逃げ穴を有する弾性体とから成る
力センサにおいて、前記スペーサ及び前記上板が
前記ケースの案内穴を有する面に接合され、かつ
前記加圧棒のストレート部が前記ケースの案内穴
内部を自在にスライドし、一端が前記上板より突
き出しかつ固定され、前記台座と前記弾性体が前
記ケースのはめあい穴に挿入され、前記加圧棒の
針先形状の先端が前記センサ素子の面に接触し、
外力が前記加圧棒に加わり、前記上板が変形する
ことにより、前記スペーサの厚さ寸法のみが前記
加圧棒の移動距離と成ることを特徴とする力セン
サ。
A case having a base on which a silicon diaphragm type sensor element is attached, a base into which the base is inserted, a fitting hole at one end of the inner side into which the outer periphery of the base is inserted, and a guide hole at the other end smaller than the fitting hole. , a spacer having a hole larger than the guide hole of the case, an upper plate having a hole smaller than the guide hole of the case and thicker than the spacer, and a spacer of an equivalent shape whose center part slides through the guide hole of the case. a pressure rod having a straight portion, one end of which has a needle tip shape, and the other end of which has a shape equivalent to the hole in the upper plate; and an escape hole that is smaller than the guide hole of the case and larger than the outer shape of the table. In the force sensor made of an elastic body, the spacer and the upper plate are joined to a surface of the case having a guide hole, and the straight part of the pressurizing rod freely slides inside the guide hole of the case, and one end protrudes from and is fixed from the upper plate, the pedestal and the elastic body are inserted into the fitting hole of the case, and the needlepoint-shaped tip of the pressure rod contacts the surface of the sensor element,
A force sensor characterized in that when an external force is applied to the pressure rod and the upper plate is deformed, only the thickness dimension of the spacer becomes the moving distance of the pressure rod.
JP17016584U 1984-11-09 1984-11-09 Pending JPS6184833U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17016584U JPS6184833U (en) 1984-11-09 1984-11-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17016584U JPS6184833U (en) 1984-11-09 1984-11-09

Publications (1)

Publication Number Publication Date
JPS6184833U true JPS6184833U (en) 1986-06-04

Family

ID=30727873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17016584U Pending JPS6184833U (en) 1984-11-09 1984-11-09

Country Status (1)

Country Link
JP (1) JPS6184833U (en)

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