JPS6185145U - - Google Patents
Info
- Publication number
- JPS6185145U JPS6185145U JP17068484U JP17068484U JPS6185145U JP S6185145 U JPS6185145 U JP S6185145U JP 17068484 U JP17068484 U JP 17068484U JP 17068484 U JP17068484 U JP 17068484U JP S6185145 U JPS6185145 U JP S6185145U
- Authority
- JP
- Japan
- Prior art keywords
- surface treatment
- liquid
- substrate surface
- backflow prevention
- prevention means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 11
- 238000001914 filtration Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 5
- 230000002265 prevention Effects 0.000 claims 3
- 238000004381 surface treatment Methods 0.000 claims 3
- 244000208734 Pisonia aculeata Species 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Description
図面は本考案の実施例の系統図。
１…液貯溜槽、２…処理液、３…往復動型ポン
プ、４…濾過装置、５…残溜液引戻し手段、６，
６′，１０，１３…配管、７…ノズル、９…スピ
ンドル。
プ、４…濾過装置、５…残溜液引戻し手段、６，
６′，１０，１３…配管、７…ノズル、９…スピ
ンドル。
Claims (1)
- 処理液が貯溜された液貯溜槽に、吸込側逆流防
止手段と吐出側逆流防止手段とを備えた往復動型
ポンプを連通し、該ポンプにより所定量の処理液
を液貯溜槽から被処理基板上に、該被処理基板に
臨設したノズルを介して供給する基板表面処理液
供給装置において、該ポンプから該ノズルに至る
配管に、濾過装置、残溜液引戻し手段を当該順序
で連設するとともに、該濾過装置の入口側と、前
記吐出側逆流防止手段の流入側とを連通する微量
逆流用の分枝配管を設けたことを特徴とする基板
表面処理液供給装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17068484U JPS6185145U (ja) | 1984-11-09 | 1984-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17068484U JPS6185145U (ja) | 1984-11-09 | 1984-11-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6185145U true JPS6185145U (ja) | 1986-06-04 |
Family
ID=30728394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17068484U Pending JPS6185145U (ja) | 1984-11-09 | 1984-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6185145U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63163077A (ja) * | 1986-12-25 | 1988-07-06 | Tokyo Electron Ltd | サツクバツクバルブ |
-
1984
- 1984-11-09 JP JP17068484U patent/JPS6185145U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63163077A (ja) * | 1986-12-25 | 1988-07-06 | Tokyo Electron Ltd | サツクバツクバルブ |