JPS6186460U - - Google Patents
Info
- Publication number
- JPS6186460U JPS6186460U JP16979484U JP16979484U JPS6186460U JP S6186460 U JPS6186460 U JP S6186460U JP 16979484 U JP16979484 U JP 16979484U JP 16979484 U JP16979484 U JP 16979484U JP S6186460 U JPS6186460 U JP S6186460U
- Authority
- JP
- Japan
- Prior art keywords
- reducing valve
- gas cylinder
- high pressure
- ion source
- pressure reducing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011810 insulating material Substances 0.000 claims description 2
- 238000005468 ion implantation Methods 0.000 claims description 2
- 230000001133 acceleration Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図はイオン注入装置の従来例概要図、第２
図は本発明のイオン注入装置の概要図である。
１……高圧イオン源、２……加速管、３……ガ
スおよび減圧弁、４……絶縁材配管。
Figure 1 is a schematic diagram of a conventional ion implanter;
The figure is a schematic diagram of the ion implantation apparatus of the present invention. 1... High pressure ion source, 2... Accelerator tube, 3... Gas and pressure reducing valve, 4... Insulating material piping.
Claims (1)
したガスボンベおよび減圧弁を配置し、前記高圧
イオン源と前記ガスボンベおよび減圧弁との間を
絶縁材料により配管した構造のイオン注入装置。 An ion implantation device having a structure in which a grounded gas cylinder and a pressure reducing valve are arranged adjacent to a high pressure ion source having an acceleration tube, and piping is provided between the high pressure ion source and the gas cylinder and pressure reducing valve using an insulating material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16979484U JPS6186460U (en) | 1984-11-08 | 1984-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16979484U JPS6186460U (en) | 1984-11-08 | 1984-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6186460U true JPS6186460U (en) | 1986-06-06 |
Family
ID=30727510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16979484U Pending JPS6186460U (en) | 1984-11-08 | 1984-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6186460U (en) |
-
1984
- 1984-11-08 JP JP16979484U patent/JPS6186460U/ja active Pending