JPS6188417A - 無接点スイッチの製造方法 - Google Patents
無接点スイッチの製造方法Info
- Publication number
- JPS6188417A JPS6188417A JP22544685A JP22544685A JPS6188417A JP S6188417 A JPS6188417 A JP S6188417A JP 22544685 A JP22544685 A JP 22544685A JP 22544685 A JP22544685 A JP 22544685A JP S6188417 A JPS6188417 A JP S6188417A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- insulating film
- electrode layer
- switch
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Manufacture Of Switches (AREA)
- Switches That Are Operated By Magnetic Or Electric Fields (AREA)
- Switches Operated By Changes In Physical Conditions (AREA)
- Push-Button Switches (AREA)
- Electronic Switches (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22544685A JPS6188417A (ja) | 1985-10-08 | 1985-10-08 | 無接点スイッチの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22544685A JPS6188417A (ja) | 1985-10-08 | 1985-10-08 | 無接点スイッチの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6188417A true JPS6188417A (ja) | 1986-05-06 |
| JPH0371731B2 JPH0371731B2 (2) | 1991-11-14 |
Family
ID=16829483
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22544685A Granted JPS6188417A (ja) | 1985-10-08 | 1985-10-08 | 無接点スイッチの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6188417A (2) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06223686A (ja) * | 1992-12-15 | 1994-08-12 | Asulab Sa | リード接触器およびその製造方法 |
-
1985
- 1985-10-08 JP JP22544685A patent/JPS6188417A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06223686A (ja) * | 1992-12-15 | 1994-08-12 | Asulab Sa | リード接触器およびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0371731B2 (2) | 1991-11-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5398011A (en) | Microrelay and a method for producing the same | |
| JP4205202B2 (ja) | 磁気マイクロスイッチおよびその製造方法 | |
| US5611940A (en) | Microsystem with integrated circuit and micromechanical component, and production process | |
| US5656512A (en) | Method of manufacturing a semiconductor accelerometer | |
| US3614678A (en) | Electromechanical filters with integral piezoresistive output and methods of making same | |
| US7242066B2 (en) | Manufacturing method of a microelectromechanical switch | |
| US3978508A (en) | Pressure sensitive field effect device | |
| KR101192412B1 (ko) | Rf 멤스 스위치 소자 및 이의 제조방법 | |
| JPH10149951A (ja) | 可変容量コンデンサ | |
| JPS6188417A (ja) | 無接点スイッチの製造方法 | |
| US7075393B2 (en) | Micromachined relay with inorganic insulation | |
| JP3669207B2 (ja) | マイクロリレー | |
| JP2001076599A (ja) | マイクロリードスイッチ、マイクロリードスイッチ体及びマイクロリードスイッチ部材の製造方法 | |
| JP4292532B2 (ja) | 機構デバイスの製造方法、機構デバイスおよびマイクロリードスイッチ | |
| JP2006269127A (ja) | マイクロマシンスイッチ及び電子機器 | |
| JP2713801B2 (ja) | 静電リレーおよびその製造方法 | |
| JPH073553Y2 (ja) | 小型磁気スイッチ | |
| JP2001023497A (ja) | 静電マイクロリレー | |
| JPH073552Y2 (ja) | 小型磁気スイッチ | |
| JP3069594U (ja) | 押しボタンスイッチ | |
| JP2004335214A (ja) | 機構デバイス及びその製造方法 | |
| US12046685B2 (en) | Semiconductor device with passive magneto-electric transducer | |
| JP2004335215A (ja) | 機構デバイス | |
| JP2864707B2 (ja) | スイッチング素子 | |
| JPH11120884A (ja) | 静電マイクロリレー |