JPS6188700A - 圧電素子 - Google Patents

圧電素子

Info

Publication number
JPS6188700A
JPS6188700A JP20972584A JP20972584A JPS6188700A JP S6188700 A JPS6188700 A JP S6188700A JP 20972584 A JP20972584 A JP 20972584A JP 20972584 A JP20972584 A JP 20972584A JP S6188700 A JPS6188700 A JP S6188700A
Authority
JP
Japan
Prior art keywords
voltage
zinc oxide
thin film
specific resistance
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20972584A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0481398B2 (de
Inventor
Keiko Kushida
恵子 櫛田
Hiroyuki Takeuchi
裕之 竹内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP20972584A priority Critical patent/JPS6188700A/ja
Publication of JPS6188700A publication Critical patent/JPS6188700A/ja
Publication of JPH0481398B2 publication Critical patent/JPH0481398B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
    • B06B1/0677—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface and a high impedance backing

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Transducers For Ultrasonic Waves (AREA)
JP20972584A 1984-10-08 1984-10-08 圧電素子 Granted JPS6188700A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20972584A JPS6188700A (ja) 1984-10-08 1984-10-08 圧電素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20972584A JPS6188700A (ja) 1984-10-08 1984-10-08 圧電素子

Publications (2)

Publication Number Publication Date
JPS6188700A true JPS6188700A (ja) 1986-05-06
JPH0481398B2 JPH0481398B2 (de) 1992-12-22

Family

ID=16577607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20972584A Granted JPS6188700A (ja) 1984-10-08 1984-10-08 圧電素子

Country Status (1)

Country Link
JP (1) JPS6188700A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0478471A (ja) * 1990-07-19 1992-03-12 Shimada Phys & Chem Ind Co Ltd 超音波振動体及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0478471A (ja) * 1990-07-19 1992-03-12 Shimada Phys & Chem Ind Co Ltd 超音波振動体及びその製造方法

Also Published As

Publication number Publication date
JPH0481398B2 (de) 1992-12-22

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