JPS618893U - Sample moving device - Google Patents
Sample moving deviceInfo
- Publication number
- JPS618893U JPS618893U JP9330384U JP9330384U JPS618893U JP S618893 U JPS618893 U JP S618893U JP 9330384 U JP9330384 U JP 9330384U JP 9330384 U JP9330384 U JP 9330384U JP S618893 U JPS618893 U JP S618893U
- Authority
- JP
- Japan
- Prior art keywords
- movement
- block
- moving device
- moving
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図はこの考案の一実施例による電子ビーム測長機の
試料移動装置を示す平面図、第２図はそのＡ−Ａ断面図
、第３図はＢ−Ｂ断面図、第４図は従来の試料移動装置
を示す正面図、第５図は他の従来の試料移動装置を示す
断面図、第６図はそのＣ−Ｃ断面図である。
各図中、同一符号は同一または相当部分を示し、１はベ
ース、２はＸ移動ガイド、３（まＹ移動′ガイド、５は
Ｘ移動ブロック、７はＸ送りねじ、１１はＹ移動ブロッ
ク、１３はＹ送りねじ、１６は移動ベース、１７はピン
、１８はＹ方向ガイド、２０はＸＹ移動ブロック、２１
はＹ伝達ブロック、２３はＸ方向ガイドである。Fig. 1 is a plan view showing a sample moving device of an electron beam length measuring machine according to an embodiment of this invention, Fig. 2 is a sectional view taken along line AA, Fig. 3 is a sectional view taken along line BB, and Fig. 4 is a sectional view taken along line BB. FIG. 5 is a front view showing a conventional sample moving device, FIG. 5 is a sectional view showing another conventional sample moving device, and FIG. 6 is a sectional view taken along line C-C. In each figure, the same reference numerals indicate the same or equivalent parts, 1 is the base, 2 is the X movement guide, 3 is the Y movement' guide, 5 is the X movement block, 7 is the X feed screw, 11 is the Y movement block, 13 is a Y feed screw, 16 is a moving base, 17 is a pin, 18 is a Y direction guide, 20 is an XY moving block, 21
is a Y transmission block, and 23 is an X direction guide.
Claims (4)
ドおよびＹ移動ガイドと、これらのＸ移動ガイドおよび
Ｙ移動ガイドに沿ってそれぞれ直角方向に移動するＸ移
動ブロックおよびＹ移動ブロックと、Ｘ移動ブロックに
取付けられる移動ベースにＹ移動ガイドと平行に設けら
れたＹ方向ガイドと、このＹ方向ガイドに沿ってＹ方向
に移動するＸＹ移動ブロックと、このＸＹ移動ブロック
のＸ方向の移動を許容しかつＹ方向に移動させるようＹ
移動ブ冶ツクに設けられたＸ方向ガイドとを備えたこと
を特徴とする試料移動装置。(1) An X movement guide and a Y movement guide provided perpendicularly to a common base, an X movement block and a Y movement block that move in the perpendicular direction along these X movement guides and Y movement guides, A Y-direction guide provided parallel to the Y-movement guide on a movable base attached to the movable block, an XY-movement block that moves in the Y-direction along this Y-direction guide, and movement of this XY-movement block in the X direction is allowed. And move it in the Y direction.
A sample moving device comprising: an X-direction guide provided on a moving block.
送りねじによって移動するものである実用新案登録請求
の範囲第１項記載の試料移動装置。(2) The sample moving device according to claim 1, wherein the X moving block and the Y moving block are each moved by a feed screw.
るようにＸ移動ブロックに取付られた実用新案登録請求
の範囲第１項または第２項記載の試料移動装置。(3) The sample moving device according to claim 1 or 2, wherein the moving base is attached to the X moving block so that the degree of orthogonality can be adjusted using the pin as a fulcrum.
向ガイドとＹ方向に係合した実用新案登録２請求の範囲
第１項ないし第３項のいずれかに記載の試料移動装置。(4) The sample moving device according to any one of claims 1 to 3, wherein the XY moving block engages with the X direction guide in the Y direction via the Y transmission block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9330384U JPS618893U (en) | 1984-06-22 | 1984-06-22 | Sample moving device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9330384U JPS618893U (en) | 1984-06-22 | 1984-06-22 | Sample moving device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS618893U true JPS618893U (en) | 1986-01-20 |
| JPH0353195Y2 JPH0353195Y2 (en) | 1991-11-20 |
Family
ID=30650860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9330384U Granted JPS618893U (en) | 1984-06-22 | 1984-06-22 | Sample moving device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS618893U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62182498U (en) * | 1986-05-10 | 1987-11-19 |
-
1984
- 1984-06-22 JP JP9330384U patent/JPS618893U/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62182498U (en) * | 1986-05-10 | 1987-11-19 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0353195Y2 (en) | 1991-11-20 |
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