JPS6190246U - - Google Patents

Info

Publication number
JPS6190246U
JPS6190246U JP17611584U JP17611584U JPS6190246U JP S6190246 U JPS6190246 U JP S6190246U JP 17611584 U JP17611584 U JP 17611584U JP 17611584 U JP17611584 U JP 17611584U JP S6190246 U JPS6190246 U JP S6190246U
Authority
JP
Japan
Prior art keywords
chip
wafer
probe card
hairline
aligning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17611584U
Other languages
Japanese (ja)
Other versions
JPH0621242Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984176115U priority Critical patent/JPH0621242Y2/en
Publication of JPS6190246U publication Critical patent/JPS6190246U/ja
Application granted granted Critical
Publication of JPH0621242Y2 publication Critical patent/JPH0621242Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図ａとｂは本考案実施例の平面図と正面図
、第２図はプローバ、テスター、マーカーの配置
を示すブロツク図、第３図はウエハの模式的平面
図、第４図はプローバの分解図、第５図ａとｂは
マーカーとウエハの相対位置を示す平面図と正面
図である。 図中、１１はプローブカード、１２はプローブ
カードの基板、１３は針、１４はガラス板、１５
はヘアライン、１６はウエハ、１７はチツプ、１
８はパツド、をそれぞれ示す。 Figures 1a and b are a plan view and a front view of an embodiment of the present invention, Figure 2 is a block diagram showing the arrangement of a prober, tester, and marker, Figure 3 is a schematic plan view of a wafer, and Figure 4 is a prober. Figures 5a and 5b are top and front views showing the relative positions of the marker and wafer. In the figure, 11 is a probe card, 12 is a substrate of the probe card, 13 is a needle, 14 is a glass plate, 15
is hairline, 16 is wafer, 17 is chip, 1
8 indicates pads, respectively.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ウエハテストに用いるプローブカードに、ウエ
ハのチツプの寸法に対応するヘアラインを設け、
チツプとプローブカードとの位置合せをチツプの
コーナーへヘアラインとを合致させることによつ
てなす構成としたことを特徴とする集積回路試験
装置。 The probe card used for wafer testing has a hairline that corresponds to the size of the wafer chip.
An integrated circuit testing device characterized in that a chip and a probe card are aligned by aligning a hairline with a corner of the chip.
JP1984176115U 1984-11-20 1984-11-20 Integrated circuit test equipment Expired - Lifetime JPH0621242Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984176115U JPH0621242Y2 (en) 1984-11-20 1984-11-20 Integrated circuit test equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984176115U JPH0621242Y2 (en) 1984-11-20 1984-11-20 Integrated circuit test equipment

Publications (2)

Publication Number Publication Date
JPS6190246U true JPS6190246U (en) 1986-06-12
JPH0621242Y2 JPH0621242Y2 (en) 1994-06-01

Family

ID=30733712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984176115U Expired - Lifetime JPH0621242Y2 (en) 1984-11-20 1984-11-20 Integrated circuit test equipment

Country Status (1)

Country Link
JP (1) JPH0621242Y2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57110946A (en) * 1980-12-27 1982-07-10 Seiko Epson Corp Heating device for specimen
JPS5939934A (en) * 1982-08-27 1984-03-05 Yamaha Motor Co Ltd Small-sized engine driven generator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57110946A (en) * 1980-12-27 1982-07-10 Seiko Epson Corp Heating device for specimen
JPS5939934A (en) * 1982-08-27 1984-03-05 Yamaha Motor Co Ltd Small-sized engine driven generator

Also Published As

Publication number Publication date
JPH0621242Y2 (en) 1994-06-01

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