JPS6190853U - - Google Patents
Info
- Publication number
- JPS6190853U JPS6190853U JP17612184U JP17612184U JPS6190853U JP S6190853 U JPS6190853 U JP S6190853U JP 17612184 U JP17612184 U JP 17612184U JP 17612184 U JP17612184 U JP 17612184U JP S6190853 U JPS6190853 U JP S6190853U
- Authority
- JP
- Japan
- Prior art keywords
- base plate
- film forming
- vacuum film
- forming apparatus
- hollow member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案になる除塵機構の一実施例、第
２図は真空蒸着装置の配置例、である。図におい
て
１はベースプレート、２は回転レール、３は蒸
着源、４はシヤツタ、６は中空部材、７は小孔、
８は開口部、９はアタツチメント、をそれぞれ表
す。
FIG. 1 shows an embodiment of the dust removal mechanism according to the present invention, and FIG. 2 shows an example of the arrangement of a vacuum evaporation device. In the figure, 1 is a base plate, 2 is a rotating rail, 3 is a deposition source, 4 is a shutter, 6 is a hollow member, 7 is a small hole,
8 represents an opening, and 9 represents an attachment.
Claims (1)
スパツタリング装置等の真空成膜装置において、 長さ方向に配列された複数個の孔を有し、且つ
給排気装置に接続する開口部を具えた中空部材を
、ベースプレートに装着してなることを特徴とす
る真空成膜装置。[Scope of Claim for Utility Model Registration] In a vacuum film forming apparatus such as a vapor deposition apparatus or sputtering apparatus having a base plate and a bell gear, an opening having a plurality of holes arranged in the length direction and connected to an air supply/exhaust apparatus. 1. A vacuum film forming apparatus characterized in that a hollow member equipped with a base plate is attached to a base plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17612184U JPS6190853U (en) | 1984-11-20 | 1984-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17612184U JPS6190853U (en) | 1984-11-20 | 1984-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6190853U true JPS6190853U (en) | 1986-06-12 |
Family
ID=30733718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17612184U Pending JPS6190853U (en) | 1984-11-20 | 1984-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6190853U (en) |
-
1984
- 1984-11-20 JP JP17612184U patent/JPS6190853U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| USD244293S (en) | Air conditioner condenser cover | |
| JPS6190853U (en) | ||
| JPS6187518U (en) | ||
| JPS63176535U (en) | ||
| JPH0324601U (en) | ||
| JPH01168551U (en) | ||
| JPS5912866U (en) | Vacuum deposition equipment | |
| JPS6042729U (en) | Film forming equipment | |
| JPS6082461U (en) | Substrate holder in vacuum evaporation equipment | |
| JPS62171016U (en) | ||
| JPS6145915U (en) | Welding light shielding surface | |
| JPS617566U (en) | Multilayer film forming equipment | |
| JPH0444361U (en) | ||
| JPH01142517U (en) | ||
| JPS5932378U (en) | rotating table | |
| JPS6416698U (en) | ||
| JPH0165851U (en) | ||
| JPS5821740U (en) | Combustion air supply device | |
| JPS63135291U (en) | ||
| JPH0389161U (en) | ||
| JPS5930289U (en) | pachinko machine unit | |
| JPS6363380U (en) | ||
| JPS63102756U (en) | ||
| JPS58147795U (en) | Wall-mounted automatic drawing device | |
| JPS59192835U (en) | spinner |