JPS6190856U - - Google Patents
Info
- Publication number
- JPS6190856U JPS6190856U JP17627384U JP17627384U JPS6190856U JP S6190856 U JPS6190856 U JP S6190856U JP 17627384 U JP17627384 U JP 17627384U JP 17627384 U JP17627384 U JP 17627384U JP S6190856 U JPS6190856 U JP S6190856U
- Authority
- JP
- Japan
- Prior art keywords
- reaction gas
- vapor phase
- phase growth
- buffer
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 239000012495 reaction gas Substances 0.000 claims 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例である気相成長装置
を示す概略的構成図、第２図は従来例を示す概略
的構成図である。
Ａ……反応室、１７……サセプタ（支持体）、
１６……ウエハ（被処理体）、１３……排気管（
排気部）、１８……バツフア。
FIG. 1 is a schematic block diagram showing a vapor phase growth apparatus which is an embodiment of the present invention, and FIG. 2 is a schematic block diagram showing a conventional example. A... Reaction chamber, 17... Susceptor (support),
16...Wafer (object to be processed), 13...Exhaust pipe (
Exhaust part), 18...Batsuhua.
Claims (1)
理体を設け、前記反応室内に反応ガスを供給して
前記被処理体に気相成長させたのち、反応ガスを
排気部から排出させる気相成長装置において、反
応ガス供給側端部に対する反応ガスの流れを整流
するバツフアを前記支持体の反応ガス供給側に設
けたことを特徴とする気相成長装置。 (2) バツフアは石英、窒化硅素、カーボン、炭
化硅素あるいはシリコンにより構成されているこ
とを特徴とする実用新案登録請求の範囲第１項記
載の気相成長装置。[Claims for Utility Model Registration] (1) After providing a processing object supported by a support in a reaction chamber, and supplying a reaction gas into the reaction chamber to cause vapor phase growth on the processing object, A vapor phase growth apparatus in which a reaction gas is discharged from an exhaust section, characterized in that a buffer is provided on the reaction gas supply side of the support for rectifying the flow of the reaction gas toward the end of the reaction gas supply side. . (2) The vapor phase growth apparatus according to claim 1, wherein the buffer is made of quartz, silicon nitride, carbon, silicon carbide, or silicon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17627384U JPS6190856U (en) | 1984-11-20 | 1984-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17627384U JPS6190856U (en) | 1984-11-20 | 1984-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6190856U true JPS6190856U (en) | 1986-06-12 |
Family
ID=30733873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17627384U Pending JPS6190856U (en) | 1984-11-20 | 1984-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6190856U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63192459U (en) * | 1987-05-29 | 1988-12-12 |
-
1984
- 1984-11-20 JP JP17627384U patent/JPS6190856U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63192459U (en) * | 1987-05-29 | 1988-12-12 |
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