JPS6192046U - - Google Patents
Info
- Publication number
- JPS6192046U JPS6192046U JP17672984U JP17672984U JPS6192046U JP S6192046 U JPS6192046 U JP S6192046U JP 17672984 U JP17672984 U JP 17672984U JP 17672984 U JP17672984 U JP 17672984U JP S6192046 U JPS6192046 U JP S6192046U
- Authority
- JP
- Japan
- Prior art keywords
- sample stage
- gas
- semiconductor
- flowed
- blades
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案の実施例の縦断面図、第２図は
第１図の点線断面図、第３図、第５図は本考案の
他の実施例の縦断面図、第４図は第３図の点線断
面図、第６図は従来の装置の縦断面図である。
１……駆動用モータ、２……ウエハ、３……試
料台、４……回転軸、７……歯車、９……羽根。
FIG. 1 is a longitudinal sectional view of an embodiment of the present invention, FIG. 2 is a sectional view taken along the dotted line in FIG. 1, FIGS. 3 and 5 are longitudinal sectional views of other embodiments of the invention, and FIG. FIG. 3 is a sectional view taken along the dotted line, and FIG. 6 is a longitudinal sectional view of the conventional device. 1... Drive motor, 2... Wafer, 3... Sample stage, 4... Rotating shaft, 7... Gear, 9... Vane.
Claims (1)
方に設けられたガス流入部より反応性気体を流し
こみ、化学的作用によりウエハ表面に成膜を行う
半導体常圧縦型ＣＶＤ装置において、ウエハを保
持する試料台を回転可能に支持し、ガスの運動エ
ネルギーを用いて前記試料台を回転させるために
羽根を設けたことを特徴とする半導体常圧縦型Ｃ
ＶＤ装置。 A semiconductor wafer is placed on a sample stage, and a reactive gas is flowed in from a gas inlet provided above the sample stage to chemically form a film on the wafer surface. Semiconductor atmospheric pressure vertical type C, characterized in that it rotatably supports a sample stage to be held and is provided with blades for rotating the sample stage using the kinetic energy of gas.
VD device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17672984U JPS6192046U (en) | 1984-11-22 | 1984-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17672984U JPS6192046U (en) | 1984-11-22 | 1984-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6192046U true JPS6192046U (en) | 1986-06-14 |
Family
ID=30734322
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17672984U Pending JPS6192046U (en) | 1984-11-22 | 1984-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6192046U (en) |
-
1984
- 1984-11-22 JP JP17672984U patent/JPS6192046U/ja active Pending
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