JPS6196546U - - Google Patents
Info
- Publication number
- JPS6196546U JPS6196546U JP18135884U JP18135884U JPS6196546U JP S6196546 U JPS6196546 U JP S6196546U JP 18135884 U JP18135884 U JP 18135884U JP 18135884 U JP18135884 U JP 18135884U JP S6196546 U JPS6196546 U JP S6196546U
- Authority
- JP
- Japan
- Prior art keywords
- silicon wafer
- stop position
- wafer
- conveyor belt
- detects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18135884U JPS6196546U (mo) | 1984-11-29 | 1984-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18135884U JPS6196546U (mo) | 1984-11-29 | 1984-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6196546U true JPS6196546U (mo) | 1986-06-21 |
Family
ID=30738908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18135884U Pending JPS6196546U (mo) | 1984-11-29 | 1984-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6196546U (mo) |
-
1984
- 1984-11-29 JP JP18135884U patent/JPS6196546U/ja active Pending
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