JPS6196688U - - Google Patents
Info
- Publication number
- JPS6196688U JPS6196688U JP17980284U JP17980284U JPS6196688U JP S6196688 U JPS6196688 U JP S6196688U JP 17980284 U JP17980284 U JP 17980284U JP 17980284 U JP17980284 U JP 17980284U JP S6196688 U JPS6196688 U JP S6196688U
- Authority
- JP
- Japan
- Prior art keywords
- silicon wafer
- robot
- wafer
- tip
- linear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は、本考案のシリコン・ウエハー挾持用
ラボツトのハンド部を示す斜視図、第２図は使用
状態を示す斜視図、第３図は、本考案の装置でハ
ンドリングするシリコン・ウエハーの平面図であ
る。
１…シリコン・ウエハー、１ａ…円弧部、１ｂ
…直線部、２…ハンド部、３…指示杆、４…爪部
、４ａ…円弧状の爪、４ｂ…直線状の爪。
Fig. 1 is a perspective view showing the hand portion of the silicon wafer holding laboratory of the present invention, Fig. 2 is a perspective view showing the state of use, and Fig. 3 is a plan view of the silicon wafer handled by the device of the present invention. It is a diagram. 1... Silicon wafer, 1a... Arc part, 1b
...Straight line part, 2...Hand part, 3...Indicator rod, 4...Claw part, 4a...Circular claw, 4b...Straight claw.
Claims (1)
装置における左右一対のハンド部の垂直方向へ支
持杆をそれぞれ設けるとともに該支持杆の先端に
シリコン・ウエハーの外周に対応する直線状およ
び円弧状の爪部を具備するシリコン・ウエハー挾
持用ロボツトのハンド部。 A silicon wafer robot handling device in which a pair of left and right hands are each provided with a support rod in the vertical direction, and each of the support rods has a linear and arcuate claw portion corresponding to the outer periphery of the silicon wafer at the tip thereof.・Hand part of robot for holding wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17980284U JPS6196688U (en) | 1984-11-27 | 1984-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17980284U JPS6196688U (en) | 1984-11-27 | 1984-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6196688U true JPS6196688U (en) | 1986-06-21 |
Family
ID=30737367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17980284U Pending JPS6196688U (en) | 1984-11-27 | 1984-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6196688U (en) |
-
1984
- 1984-11-27 JP JP17980284U patent/JPS6196688U/ja active Pending