JPS619671B2 - - Google Patents

Info

Publication number
JPS619671B2
JPS619671B2 JP54069883A JP6988379A JPS619671B2 JP S619671 B2 JPS619671 B2 JP S619671B2 JP 54069883 A JP54069883 A JP 54069883A JP 6988379 A JP6988379 A JP 6988379A JP S619671 B2 JPS619671 B2 JP S619671B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54069883A
Other languages
Japanese (ja)
Other versions
JPS55162178A (en
Inventor
Toshimitsu Hamada
Hiroshi Makihira
Yasuo Nakagawa
Makoto Uko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6988379A priority Critical patent/JPS55162178A/ja
Publication of JPS55162178A publication Critical patent/JPS55162178A/ja
Publication of JPS619671B2 publication Critical patent/JPS619671B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Input (AREA)
JP6988379A 1979-06-06 1979-06-06 Pattern checker Granted JPS55162178A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6988379A JPS55162178A (en) 1979-06-06 1979-06-06 Pattern checker

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6988379A JPS55162178A (en) 1979-06-06 1979-06-06 Pattern checker

Publications (2)

Publication Number Publication Date
JPS55162178A JPS55162178A (en) 1980-12-17
JPS619671B2 true JPS619671B2 (2) 1986-03-25

Family

ID=13415593

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6988379A Granted JPS55162178A (en) 1979-06-06 1979-06-06 Pattern checker

Country Status (1)

Country Link
JP (1) JPS55162178A (2)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH079401B2 (ja) * 1986-03-31 1995-02-01 三菱マテリアル株式会社 核燃料用ペレツト端面の欠陥検査方法
JPH04319651A (ja) * 1991-04-19 1992-11-10 Inax Corp タイルユニットの検査方法
EP2549078A1 (de) 2011-07-21 2013-01-23 Siemens Aktiengesellschaft Ansaugkanal für Ansaugluft einer Gasturbine und Verfahren zum Betrieb einer stationären Gasturbine

Also Published As

Publication number Publication date
JPS55162178A (en) 1980-12-17

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