JPS62102518A - 半導体製造装置用シユラウドの製造方法 - Google Patents

半導体製造装置用シユラウドの製造方法

Info

Publication number
JPS62102518A
JPS62102518A JP24366485A JP24366485A JPS62102518A JP S62102518 A JPS62102518 A JP S62102518A JP 24366485 A JP24366485 A JP 24366485A JP 24366485 A JP24366485 A JP 24366485A JP S62102518 A JPS62102518 A JP S62102518A
Authority
JP
Japan
Prior art keywords
shroud
cylinder
film
corrosion
cooling fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24366485A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0568539B2 (2
Inventor
Yutaka Kato
豊 加藤
Eizo Isoyama
礒山　永三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Altemira Co Ltd
Original Assignee
Showa Aluminum Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Aluminum Corp filed Critical Showa Aluminum Corp
Priority to JP24366485A priority Critical patent/JPS62102518A/ja
Publication of JPS62102518A publication Critical patent/JPS62102518A/ja
Publication of JPH0568539B2 publication Critical patent/JPH0568539B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP24366485A 1985-10-29 1985-10-29 半導体製造装置用シユラウドの製造方法 Granted JPS62102518A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24366485A JPS62102518A (ja) 1985-10-29 1985-10-29 半導体製造装置用シユラウドの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24366485A JPS62102518A (ja) 1985-10-29 1985-10-29 半導体製造装置用シユラウドの製造方法

Publications (2)

Publication Number Publication Date
JPS62102518A true JPS62102518A (ja) 1987-05-13
JPH0568539B2 JPH0568539B2 (2) 1993-09-29

Family

ID=17107165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24366485A Granted JPS62102518A (ja) 1985-10-29 1985-10-29 半導体製造装置用シユラウドの製造方法

Country Status (1)

Country Link
JP (1) JPS62102518A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01261816A (ja) * 1988-04-12 1989-10-18 Showa Alum Corp 真空チャンバにおける真空用冷却装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01261816A (ja) * 1988-04-12 1989-10-18 Showa Alum Corp 真空チャンバにおける真空用冷却装置

Also Published As

Publication number Publication date
JPH0568539B2 (2) 1993-09-29

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