JPS62108730U - - Google Patents
Info
- Publication number
- JPS62108730U JPS62108730U JP20053385U JP20053385U JPS62108730U JP S62108730 U JPS62108730 U JP S62108730U JP 20053385 U JP20053385 U JP 20053385U JP 20053385 U JP20053385 U JP 20053385U JP S62108730 U JPS62108730 U JP S62108730U
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- local
- work areas
- clean
- local work
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000000428 dust Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20053385U JPS62108730U (2) | 1985-12-26 | 1985-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20053385U JPS62108730U (2) | 1985-12-26 | 1985-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62108730U true JPS62108730U (2) | 1987-07-11 |
Family
ID=31163127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20053385U Pending JPS62108730U (2) | 1985-12-26 | 1985-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62108730U (2) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017161103A (ja) * | 2016-03-07 | 2017-09-14 | トヨタ自動車株式会社 | 空気浄化システム |
-
1985
- 1985-12-26 JP JP20053385U patent/JPS62108730U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017161103A (ja) * | 2016-03-07 | 2017-09-14 | トヨタ自動車株式会社 | 空気浄化システム |
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