JPS62112840U - - Google Patents

Info

Publication number
JPS62112840U
JPS62112840U JP19279385U JP19279385U JPS62112840U JP S62112840 U JPS62112840 U JP S62112840U JP 19279385 U JP19279385 U JP 19279385U JP 19279385 U JP19279385 U JP 19279385U JP S62112840 U JPS62112840 U JP S62112840U
Authority
JP
Japan
Prior art keywords
needle
cathode
ion source
protrude
embedded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19279385U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19279385U priority Critical patent/JPS62112840U/ja
Publication of JPS62112840U publication Critical patent/JPS62112840U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す断面の模式図
、第２図は従来のＰＩＧイオン源の断面の概略を
示した模式図である。 １１……陰極、１３……針。

Claims (1)

    【実用新案登録請求の範囲】
  1. 一対の陰極の互いに向きあつた端面にスパツタ
    リング現象による消耗が前記陰極より少ない材質
    からなる針を埋め込み前記針の端部を前記端面よ
    り突出させたことを特徴とするＰＩＧイオン源。
JP19279385U 1985-12-14 1985-12-14 Pending JPS62112840U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19279385U JPS62112840U (ja) 1985-12-14 1985-12-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19279385U JPS62112840U (ja) 1985-12-14 1985-12-14

Publications (1)

Publication Number Publication Date
JPS62112840U true JPS62112840U (ja) 1987-07-18

Family

ID=31148208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19279385U Pending JPS62112840U (ja) 1985-12-14 1985-12-14

Country Status (1)

Country Link
JP (1) JPS62112840U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006093137A (ja) * 2004-09-20 2006-04-06 Samsung Electronics Co Ltd イオン電流密度を向上させるアークチャンバを持つイオン注入装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006093137A (ja) * 2004-09-20 2006-04-06 Samsung Electronics Co Ltd イオン電流密度を向上させるアークチャンバを持つイオン注入装置

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