JPS6211558U - - Google Patents

Info

Publication number
JPS6211558U
JPS6211558U JP1985102530U JP10253085U JPS6211558U JP S6211558 U JPS6211558 U JP S6211558U JP 1985102530 U JP1985102530 U JP 1985102530U JP 10253085 U JP10253085 U JP 10253085U JP S6211558 U JPS6211558 U JP S6211558U
Authority
JP
Japan
Prior art keywords
driver
locking
locking grooves
arrangement angle
surface plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985102530U
Other languages
English (en)
Other versions
JPH0243655Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985102530U priority Critical patent/JPH0243655Y2/ja
Priority to US06/876,690 priority patent/US4707945A/en
Publication of JPS6211558U publication Critical patent/JPS6211558U/ja
Application granted granted Critical
Publication of JPH0243655Y2 publication Critical patent/JPH0243655Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す要部断面図、
第２図はドライバの斜視図、第３図は係止溝と係
止部材との位置関係を示す平面図、第４図は平面
研摩装置の基本的構成を示す断面図である。 １０……上定盤、１１……下定盤、１２……ド
ライバ、１７……係止溝、１８……隔壁、２０ａ
，２０ｂ……係止部材、２４……ばね。

Claims (1)

    【実用新案登録請求の範囲】
  1. 上下の定盤によりワークを研摩する研摩部の中
    央に円筒状ドライバを立設し、該ドライバの外側
    面に、頂部が先細りをなす隔壁で区画された複数
    の係止溝を円周方向に一定の配列角度で縦設し、
    該ドライバにより駆動される上定盤の中心孔の回
    りに、上記係止溝に係脱自在の複数の係止部材を
    ドライバの軸線を含む平面内で回動自在に取付け
    、各係止部材をばねによりドライバ側へ付勢した
    平面研摩装置において、上記係止部材を二つのグ
    ループに分割し、各グループにおける係止部材を
    それぞれ係止溝の配列角度の整数倍の角度で配設
    すると共に、両グループの係止部材間に係止溝の
    配列角度の１／２倍の位相差をもたせたことを特
    徴とする平面研摩装置における上定盤駆動装置。
JP1985102530U 1985-07-05 1985-07-05 Expired JPH0243655Y2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1985102530U JPH0243655Y2 (ja) 1985-07-05 1985-07-05
US06/876,690 US4707945A (en) 1985-07-05 1986-06-20 Upper plate driving system for surface lapping machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985102530U JPH0243655Y2 (ja) 1985-07-05 1985-07-05

Publications (2)

Publication Number Publication Date
JPS6211558U true JPS6211558U (ja) 1987-01-24
JPH0243655Y2 JPH0243655Y2 (ja) 1990-11-20

Family

ID=14329859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985102530U Expired JPH0243655Y2 (ja) 1985-07-05 1985-07-05

Country Status (2)

Country Link
US (1) US4707945A (ja)
JP (1) JPH0243655Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH064506U (ja) * 1992-06-24 1994-01-21 象印マホービン株式会社 電熱調理器具の安全装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5665656A (en) * 1995-05-17 1997-09-09 National Semiconductor Corporation Method and apparatus for polishing a semiconductor substrate wafer
US5957763A (en) * 1997-09-19 1999-09-28 Speedfam Corporation Polishing apparatus with support columns supporting multiple platform members
US5997390A (en) * 1998-02-02 1999-12-07 Speedfam Corporation Polishing apparatus with improved alignment of polishing plates

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3290918A (en) * 1963-12-06 1966-12-13 Anthony V Weasler Method of manufacturing a shaft coupling
US4157637A (en) * 1977-08-30 1979-06-12 Moskovskoe Vysshee Tekhnicheskoe Uchilische Imeni N.E. Baumana Planetary-type lapping machine for lapping a group of workpieces
US4392759A (en) * 1981-02-09 1983-07-12 General Electric Company Quick disconnect mechanism for shafts
JPS57168109A (en) * 1981-04-10 1982-10-16 Shinetsu Eng Kk Device for measuring thickness of work piece in lapping plate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH064506U (ja) * 1992-06-24 1994-01-21 象印マホービン株式会社 電熱調理器具の安全装置

Also Published As

Publication number Publication date
JPH0243655Y2 (ja) 1990-11-20
US4707945A (en) 1987-11-24

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