JPS62126832U - - Google Patents
Info
- Publication number
- JPS62126832U JPS62126832U JP1326486U JP1326486U JPS62126832U JP S62126832 U JPS62126832 U JP S62126832U JP 1326486 U JP1326486 U JP 1326486U JP 1326486 U JP1326486 U JP 1326486U JP S62126832 U JPS62126832 U JP S62126832U
- Authority
- JP
- Japan
- Prior art keywords
- ultraviolet
- cleaning
- cleaned
- irradiation means
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 8
- 238000005507 spraying Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1326486U JPS62126832U (de) | 1986-02-03 | 1986-02-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1326486U JPS62126832U (de) | 1986-02-03 | 1986-02-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62126832U true JPS62126832U (de) | 1987-08-12 |
Family
ID=30802158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1326486U Pending JPS62126832U (de) | 1986-02-03 | 1986-02-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62126832U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6333824A (ja) * | 1986-07-28 | 1988-02-13 | Dainippon Screen Mfg Co Ltd | 表面洗浄方法 |
| JPH078928A (ja) * | 1993-06-14 | 1995-01-13 | Internatl Business Mach Corp <Ibm> | 改良されたエアロゾル洗浄装置 |
-
1986
- 1986-02-03 JP JP1326486U patent/JPS62126832U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6333824A (ja) * | 1986-07-28 | 1988-02-13 | Dainippon Screen Mfg Co Ltd | 表面洗浄方法 |
| JPH078928A (ja) * | 1993-06-14 | 1995-01-13 | Internatl Business Mach Corp <Ibm> | 改良されたエアロゾル洗浄装置 |
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