JPS62129061U - - Google Patents
Info
- Publication number
- JPS62129061U JPS62129061U JP1782486U JP1782486U JPS62129061U JP S62129061 U JPS62129061 U JP S62129061U JP 1782486 U JP1782486 U JP 1782486U JP 1782486 U JP1782486 U JP 1782486U JP S62129061 U JPS62129061 U JP S62129061U
- Authority
- JP
- Japan
- Prior art keywords
- reaction vessel
- forming apparatus
- film forming
- gas
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 7
- 238000004140 cleaning Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 2
- 230000007423 decrease Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000012495 reaction gas Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1782486U JPS62129061U (2) | 1986-02-10 | 1986-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1782486U JPS62129061U (2) | 1986-02-10 | 1986-02-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62129061U true JPS62129061U (2) | 1987-08-15 |
Family
ID=30810933
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1782486U Pending JPS62129061U (2) | 1986-02-10 | 1986-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62129061U (2) |
-
1986
- 1986-02-10 JP JP1782486U patent/JPS62129061U/ja active Pending
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