JPS62129934A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS62129934A JPS62129934A JP26951185A JP26951185A JPS62129934A JP S62129934 A JPS62129934 A JP S62129934A JP 26951185 A JP26951185 A JP 26951185A JP 26951185 A JP26951185 A JP 26951185A JP S62129934 A JPS62129934 A JP S62129934A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- film
- recording medium
- magnetic recording
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 52
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract description 6
- 239000000758 substrate Substances 0.000 abstract description 5
- 229910052786 argon Inorganic materials 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 229910018487 Ni—Cr Inorganic materials 0.000 abstract description 2
- 230000004075 alteration Effects 0.000 abstract 1
- 230000033458 reproduction Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 26
- 239000002184 metal Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 8
- 238000000635 electron micrograph Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、磁気テープ、磁気ディスク等の磁気記録媒体
に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to magnetic recording media such as magnetic tapes and magnetic disks.
従来より高密度記録の観点から、例えば非磁性基板上に
Crの下地膜を設け、このCr下地膜且にCo−Ni−
Cr又はCo−Ni 等の金属磁性膜を設けた金属薄
膜型の磁気記録媒体が提案されている。Conventionally, from the viewpoint of high-density recording, for example, a Cr underlayer is provided on a nonmagnetic substrate, and this Cr underlayer and Co-Ni-
A metal thin film type magnetic recording medium provided with a metal magnetic film such as Cr or Co--Ni has been proposed.
そして、このような磁気記録媒体において、より一層高
密度化を図る為に、保磁力11cを高める為の研究が行
なわれている。In order to further increase the density of such magnetic recording media, research is being conducted to increase the coercive force 11c.
これらの研究の結果、保磁力Hc を高くする手段と
して、例えば金属磁性膜の形成を科目蒸着法で行なう手
段とか、多層膜化の手段とか、又は金属磁性膜の蒸着形
成時に酸素ガスを導入する手段等が提案されている。As a result of these studies, as a means to increase the coercive force Hc, for example, forming a metal magnetic film using a vapor deposition method, forming a multilayer film, or introducing oxygen gas when forming a metal magnetic film by vapor deposition. Measures have been proposed.
しかし、これらの提案によって充分満足できる磁気記録
媒体が得られるものでもなく、例えば科目蒸着法の手段
は生産性が著しく悪い欠点があり、又、多層膜化の手段
は工程が著しく面倒で、生産性が悪い欠点があり、又、
酸素ガス導入法による手段は保磁力Hcの向上がそれ程
でもないといった欠点がある。However, these proposals do not result in a fully satisfactory magnetic recording medium; for example, the vapor deposition method has the disadvantage of extremely poor productivity, and the multilayer film method requires extremely troublesome processes and production It has some disadvantages, and
The method of introducing oxygen gas has a drawback in that the coercive force Hc is not significantly improved.
本発明者は、金属薄膜型の磁気記録媒体の高密度化の研
究を進めていくうちに、金属磁性膜の下地膜によって高
密度化の特性が大きく左右されるのではないかと考え、
この方面の研究に全力を注いだ。While conducting research on increasing the density of metal thin film type magnetic recording media, the present inventor thought that the characteristics of increasing the density may be greatly influenced by the underlying film of the metal magnetic film.
I have poured all my energy into research in this area.
すなわち、金属薄膜型の磁気記録媒体の高密度化の為の
研究は、これまでは金属磁性膜に目が向けられていたの
であるが、本発明者は、これまでの研究の流とは異なる
方向に目を向け、金属磁性膜の下地膜の構成に研究の主
力を注いだのである。In other words, research to increase the density of metal thin film type magnetic recording media has so far focused on metal magnetic films, but the present inventor has developed a research method that differs from the current research flow. With this in mind, he focused his research efforts on the structure of the underlying film for metal magnetic films.
そして、このような研究の結果、本発明者は、金属磁性
膜の下地膜として従来から提案されているCr層にNi
を介在させた磁気記録媒体は、この下地膜の結晶粒が微
細化していること(第1図にNiが2.7重量%含有さ
れているCrT地膜表面の電子顕微鏡写真を、又、第2
図にNiが全く含有されてないCrT地膜表面の電子顕
微鏡写真を示す。尚、これらの下地膜は、アルゴンガス
圧が40mTorrの条件下でスパッタ手段によって成
膜されたものである。)によると思われるのであるが、
保磁力Hc、角型比Rs、及びS*等の磁気特性が向ト
し、高密度記録により好ましいものであることを見い出
したのである。As a result of such research, the present inventor discovered that Ni could be added to the Cr layer, which has been proposed as an underlying film for metal magnetic films.
The magnetic recording medium with the intervening CrT film has finer crystal grains (Fig. 1 shows an electron micrograph of the surface of the CrT film containing 2.7% by weight of Ni, and Fig. 2
The figure shows an electron micrograph of the surface of a CrT film that does not contain any Ni. It should be noted that these base films were formed by sputtering under conditions of an argon gas pressure of 40 mTorr. ), but
It was discovered that magnetic properties such as coercive force Hc, squareness ratio Rs, and S* are improved, making it more preferable for high-density recording.
尚、このCrT地膜中に添加するNiは、その割合が約
2へ・8重量%であることが望ましい。すなわち、Ni
量が少なすぎると、Ni添加による保磁力Hc、角型比
Rs、及びS*といった磁気特性の白玉効果はそれだけ
小さく、又、逆にNi 量が多くなりすぎると、床磁
力Hc等のω気持性が低下したからである。Note that it is desirable that the proportion of Ni added to this CrT film be approximately 2.8% by weight. That is, Ni
If the amount is too small, the white-bead effect on magnetic properties such as coercive force Hc, squareness ratio Rs, and S* due to Ni addition will be correspondingly small, and conversely, if the amount of Ni is too large, ω-like effects such as bed magnetic force Hc will be reduced. This is because their sexuality has decreased.
又、このNiを含有するCrの下地層は、その厚さが約
500人〜10000人であることが望ましく、又、金
属磁性膜は、その厚さが約200λ〜2000λである
ことが望ましい。The thickness of the Ni-containing Cr underlayer is preferably about 500 to 10,000, and the thickness of the metal magnetic film is preferably about 200 to 2,000.
純Crのターゲツト板上に純Niのチップを置いて、ア
ルゴンガス圧約40mTorr、基板温度約100℃の
条件下でスパックリングし、所定の非磁性基板上にNi
を約2〜8重量%含有するCrWj(磁性下地膜)を約
4000人厚形成する。A pure Ni chip was placed on a pure Cr target plate, sputtered under conditions of an argon gas pressure of about 40 mTorr and a substrate temperature of about 100°C, and a Ni chip was placed on a predetermined non-magnetic substrate.
A CrWj (magnetic base film) containing approximately 2 to 8% by weight of CrWj is formed to a thickness of approximately 4000 mm.
次に、この磁性下地膜上に、Co −N i −Cr
の磁性膜をエピタキシャル成長させて約soo A厚
の金属磁性膜を形成し、磁気記録媒体を得る。Next, on this magnetic base film, Co-Ni-Cr
The magnetic film is epitaxially grown to form a metal magnetic film with a thickness of about soo A to obtain a magnetic recording medium.
前記実施例における磁性下地膜形成時に純Crのターゲ
ツト板上に置いた純Niのチップを取り去り、その他は
全く同様にして磁気記録媒体を得る。A magnetic recording medium is obtained in exactly the same manner as in the previous example except that the pure Ni chip placed on the pure Cr target plate during the formation of the magnetic underlayer is removed.
すなわち、磁性下地膜が純Crで構成された磁気記録媒
体を得る。That is, a magnetic recording medium in which the magnetic underlayer is made of pure Cr is obtained.
上記各側で得た磁気記録媒体について、その保磁力Hc
、角型比Rs、及びジを測定すると、表に示す通りであ
る。Regarding the magnetic recording medium obtained on each side above, its coercive force Hc
, squareness ratio Rs, and di were measured as shown in the table.
表
この表かられかるように、Crの磁性下地膜中にNiを
含有させた磁気記録媒体は、保磁力HC1角型比Rs、
及びS等の磁気特性が向上しており、再生出力の増大、
記録密度の向上が期待できるものである。Table As can be seen from this table, the magnetic recording medium containing Ni in the Cr magnetic underlayer has a coercive force HC1 squareness ratio Rs,
Magnetic properties such as S and S are improved, increasing playback output,
This can be expected to improve recording density.
本発明に係る磁気記録媒体は、磁性膜の下地膜としてC
r層が構成された磁気記録媒体において、このCr層に
Niを介在させたので、保磁力Hc、角型比Rs、及び
S*等の磁気特性が向上し、再生出力の増大及び記録密
度の向上が期待でき、又、従来の磁気記録媒体の製造プ
ロセスに大巾な改変なくしても製造でき、簡単かつ低コ
ストで提供できる等の特長を有する。The magnetic recording medium according to the present invention has carbon as the base film of the magnetic film.
In a magnetic recording medium configured with an r layer, Ni is interposed in the Cr layer, so magnetic properties such as coercive force Hc, squareness ratio Rs, and S* are improved, and reproduction output and recording density are increased. Further, it has the advantage that it can be manufactured without major modification to the conventional manufacturing process of magnetic recording media, and can be provided easily and at low cost.
第1図は本発明に係る磁気記録媒体の下地膜の電子顕微
鏡写真、第2図は従来の磁気記録媒体の下地膜の電子顕
微鏡写真である。
ゝ−2・、I
−゛・こT:”’!、 ii ″、j+・・μ第 2.
′み、1 第 ? A手 続
tlll 正 8(方式)%式%
1、事件の表示
特願昭[jO−269511号
2、発明の名称
磁気記録媒体
3、補正をする者
事件との関(系 特許出願人
日本ビクター株式会社
4、代理人
昭和61年2月5日
6、補正の対象
(1,)発明の詳細な説明
・、シt“
(1)明細書第3ページ第6〜12行目[(第1図・・
・・・・ある、)」を削除する。
(2)明細ご第6ページ第7〜10行目f41図面・・
・・・・ある。」を削除する。
〈3)I2!面3削除する。FIG. 1 is an electron micrograph of a base film of a magnetic recording medium according to the present invention, and FIG. 2 is an electron micrograph of a base film of a conventional magnetic recording medium.ゝ-2・, I −゛・koT: ”'!, ii ″, j+...μth 2.
'Mi, 1st? A Procedure tllll Correct 8 (Method) % Formula % 1. Indication of the case Patent application No. Co., Ltd. 4, Agent February 5, 1986 6, Subject of amendment (1,) Detailed explanation of the invention (1) Page 3 of the specification, lines 6 to 12 [(1st figure··
...)" is deleted. (2) Details, page 6, lines 7-10 f41 drawing...
····be. ” to be deleted. <3) I2! Delete side 3.
Claims (1)
において、このCr層にNiを介在させたことを特徴と
する磁気記録媒体。A magnetic recording medium comprising a Cr layer as a base film of a magnetic film, characterized in that the Cr layer has Ni interposed therein.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26951185A JPS62129934A (en) | 1985-12-02 | 1985-12-02 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26951185A JPS62129934A (en) | 1985-12-02 | 1985-12-02 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62129934A true JPS62129934A (en) | 1987-06-12 |
Family
ID=17473433
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26951185A Pending JPS62129934A (en) | 1985-12-02 | 1985-12-02 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62129934A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01144209A (en) * | 1987-12-01 | 1989-06-06 | Denki Kagaku Kogyo Kk | Magnetic recording medium |
| US5436047A (en) * | 1991-09-24 | 1995-07-25 | International Business Machines Corporation | Thin film magnetic recording disk comprising a metallic disk blank, a substantially non-magnetic Ni-Cr-O film having a textured surface and a magnetic film |
-
1985
- 1985-12-02 JP JP26951185A patent/JPS62129934A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01144209A (en) * | 1987-12-01 | 1989-06-06 | Denki Kagaku Kogyo Kk | Magnetic recording medium |
| US5436047A (en) * | 1991-09-24 | 1995-07-25 | International Business Machines Corporation | Thin film magnetic recording disk comprising a metallic disk blank, a substantially non-magnetic Ni-Cr-O film having a textured surface and a magnetic film |
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