JPS62146916U - - Google Patents
Info
- Publication number
- JPS62146916U JPS62146916U JP3453786U JP3453786U JPS62146916U JP S62146916 U JPS62146916 U JP S62146916U JP 3453786 U JP3453786 U JP 3453786U JP 3453786 U JP3453786 U JP 3453786U JP S62146916 U JPS62146916 U JP S62146916U
- Authority
- JP
- Japan
- Prior art keywords
- slit plate
- metal thin
- rotary encoder
- thin film
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 4
- 239000010408 film Substances 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 claims description 3
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3453786U JPS62146916U (fr) | 1986-03-12 | 1986-03-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3453786U JPS62146916U (fr) | 1986-03-12 | 1986-03-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62146916U true JPS62146916U (fr) | 1987-09-17 |
Family
ID=30843183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3453786U Pending JPS62146916U (fr) | 1986-03-12 | 1986-03-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62146916U (fr) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58184908A (ja) * | 1982-04-23 | 1983-10-28 | Sotsukishiya:Kk | 円板形光減衰器 |
-
1986
- 1986-03-12 JP JP3453786U patent/JPS62146916U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58184908A (ja) * | 1982-04-23 | 1983-10-28 | Sotsukishiya:Kk | 円板形光減衰器 |
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