JPS62147832U - - Google Patents
Info
- Publication number
- JPS62147832U JPS62147832U JP17198885U JP17198885U JPS62147832U JP S62147832 U JPS62147832 U JP S62147832U JP 17198885 U JP17198885 U JP 17198885U JP 17198885 U JP17198885 U JP 17198885U JP S62147832 U JPS62147832 U JP S62147832U
- Authority
- JP
- Japan
- Prior art keywords
- information
- air supply
- particulate
- receiver
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17198885U JPS62147832U (2) | 1985-11-08 | 1985-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17198885U JPS62147832U (2) | 1985-11-08 | 1985-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62147832U true JPS62147832U (2) | 1987-09-18 |
Family
ID=31108124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17198885U Pending JPS62147832U (2) | 1985-11-08 | 1985-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62147832U (2) |
-
1985
- 1985-11-08 JP JP17198885U patent/JPS62147832U/ja active Pending
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