JPS62151735U - - Google Patents
Info
- Publication number
- JPS62151735U JPS62151735U JP3921386U JP3921386U JPS62151735U JP S62151735 U JPS62151735 U JP S62151735U JP 3921386 U JP3921386 U JP 3921386U JP 3921386 U JP3921386 U JP 3921386U JP S62151735 U JPS62151735 U JP S62151735U
- Authority
- JP
- Japan
- Prior art keywords
- coating device
- rotating part
- receiving
- flying
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3921386U JPS62151735U (2) | 1986-03-18 | 1986-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3921386U JPS62151735U (2) | 1986-03-18 | 1986-03-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62151735U true JPS62151735U (2) | 1987-09-26 |
Family
ID=30852178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3921386U Pending JPS62151735U (2) | 1986-03-18 | 1986-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62151735U (2) |
-
1986
- 1986-03-18 JP JP3921386U patent/JPS62151735U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS62151735U (2) | ||
| USD289541S (en) | Playground rotating swing | |
| ES296352U (es) | Dispositivo para configurar un material semi-humedo en forma de esferas, sin desintegrar o pulverizar sustancialmente el material | |
| JPH0372155U (2) | ||
| JPS6412678U (2) | ||
| JPS62131433U (2) | ||
| JPS6326399U (2) | ||
| JPS6336720U (2) | ||
| JPH0361404U (2) | ||
| JPS62126288U (2) | ||
| JPS6215613U (2) | ||
| JPS61162859U (2) | ||
| JPS61121861U (2) | ||
| JPH0366673U (2) | ||
| JPS63351U (2) | ||
| JPH0289823U (2) | ||
| JPS6279480U (2) | ||
| JPS60144539A (ja) | 散水装置 | |
| JPS60117034U (ja) | 半導体真空回転チヤツク | |
| JPS6424723U (2) | ||
| JPS6288565U (2) | ||
| JPS6452798U (2) | ||
| JPS6390623U (2) | ||
| JPS60143852A (ja) | 散水装置 | |
| JPS62183632U (2) |