JPS62152432U - - Google Patents
Info
- Publication number
- JPS62152432U JPS62152432U JP3972386U JP3972386U JPS62152432U JP S62152432 U JPS62152432 U JP S62152432U JP 3972386 U JP3972386 U JP 3972386U JP 3972386 U JP3972386 U JP 3972386U JP S62152432 U JPS62152432 U JP S62152432U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- lid body
- heat
- semiconductor wafers
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
Landscapes
- Control Of Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3972386U JPS62152432U (mo) | 1986-03-20 | 1986-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3972386U JPS62152432U (mo) | 1986-03-20 | 1986-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62152432U true JPS62152432U (mo) | 1987-09-28 |
Family
ID=30853157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3972386U Pending JPS62152432U (mo) | 1986-03-20 | 1986-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62152432U (mo) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002158217A (ja) * | 2000-11-16 | 2002-05-31 | Tokyo Electron Ltd | 縦型熱処理装置及び熱処理方法 |
-
1986
- 1986-03-20 JP JP3972386U patent/JPS62152432U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002158217A (ja) * | 2000-11-16 | 2002-05-31 | Tokyo Electron Ltd | 縦型熱処理装置及び熱処理方法 |
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