JPS62161326U - - Google Patents
Info
- Publication number
- JPS62161326U JPS62161326U JP4858186U JP4858186U JPS62161326U JP S62161326 U JPS62161326 U JP S62161326U JP 4858186 U JP4858186 U JP 4858186U JP 4858186 U JP4858186 U JP 4858186U JP S62161326 U JPS62161326 U JP S62161326U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- master
- substrate holder
- transfer target
- master substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 23
- 238000007789 sealing Methods 0.000 claims description 8
- 238000000926 separation method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4858186U JPH0437293Y2 (2) | 1986-03-31 | 1986-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4858186U JPH0437293Y2 (2) | 1986-03-31 | 1986-03-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62161326U true JPS62161326U (2) | 1987-10-14 |
| JPH0437293Y2 JPH0437293Y2 (2) | 1992-09-02 |
Family
ID=30870244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4858186U Expired JPH0437293Y2 (2) | 1986-03-31 | 1986-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437293Y2 (2) |
-
1986
- 1986-03-31 JP JP4858186U patent/JPH0437293Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0437293Y2 (2) | 1992-09-02 |
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