JPS62162660U - - Google Patents
Info
- Publication number
- JPS62162660U JPS62162660U JP5069286U JP5069286U JPS62162660U JP S62162660 U JPS62162660 U JP S62162660U JP 5069286 U JP5069286 U JP 5069286U JP 5069286 U JP5069286 U JP 5069286U JP S62162660 U JPS62162660 U JP S62162660U
- Authority
- JP
- Japan
- Prior art keywords
- ray
- size
- evaluates
- slits
- irradiating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5069286U JPS62162660U (cs) | 1986-04-04 | 1986-04-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5069286U JPS62162660U (cs) | 1986-04-04 | 1986-04-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62162660U true JPS62162660U (cs) | 1987-10-16 |
Family
ID=30874284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5069286U Pending JPS62162660U (cs) | 1986-04-04 | 1986-04-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62162660U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017106788A (ja) * | 2015-12-09 | 2017-06-15 | 三菱電機株式会社 | 基準素子 |
-
1986
- 1986-04-04 JP JP5069286U patent/JPS62162660U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017106788A (ja) * | 2015-12-09 | 2017-06-15 | 三菱電機株式会社 | 基準素子 |
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