JPS6216497B2 - - Google Patents
Info
- Publication number
- JPS6216497B2 JPS6216497B2 JP53125866A JP12586678A JPS6216497B2 JP S6216497 B2 JPS6216497 B2 JP S6216497B2 JP 53125866 A JP53125866 A JP 53125866A JP 12586678 A JP12586678 A JP 12586678A JP S6216497 B2 JPS6216497 B2 JP S6216497B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- valve
- pressure
- hole
- conductance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 88
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 18
- 238000000034 method Methods 0.000 description 13
- 229910052786 argon Inorganic materials 0.000 description 9
- 238000004891 communication Methods 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 3
- 239000000945 filler Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 241000239290 Araneae Species 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005429 filling process Methods 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
- H01J9/395—Filling vessels
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Discharge Lamp (AREA)
- Control Of Fluid Pressure (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12586678A JPS5553043A (en) | 1978-10-13 | 1978-10-13 | Sealing gas stabilizing device |
| US06/196,763 US4364617A (en) | 1978-10-13 | 1979-10-11 | Method and apparatus for stabilizing the pressure of a gas in a closed body |
| GB8017627A GB2046989B (en) | 1978-10-13 | 1979-10-11 | Device for stabilizing sealed gas pressure |
| PCT/JP1979/000258 WO1980000896A1 (fr) | 1978-10-13 | 1979-10-11 | Dispositif de stabilisation de la pression d'un gaz enferme |
| DE2953247A DE2953247C1 (de) | 1978-10-13 | 1979-10-11 | Vorrichtung zur Stabilisierung des Drucks eines in einer Lampenroehre einzuschliessenden Gases |
| DE792953247T DE2953247A1 (de) | 1978-10-13 | 1979-10-11 | Device for stabilizing sealed gas pressure |
| NLAANVRAGE7920081,A NL182437C (nl) | 1978-10-13 | 1979-10-11 | Inrichting voor het vullen van een buisvormige ballon met een gas. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12586678A JPS5553043A (en) | 1978-10-13 | 1978-10-13 | Sealing gas stabilizing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5553043A JPS5553043A (en) | 1980-04-18 |
| JPS6216497B2 true JPS6216497B2 (2) | 1987-04-13 |
Family
ID=14920867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12586678A Granted JPS5553043A (en) | 1978-10-13 | 1978-10-13 | Sealing gas stabilizing device |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4364617A (2) |
| JP (1) | JPS5553043A (2) |
| DE (2) | DE2953247C1 (2) |
| GB (1) | GB2046989B (2) |
| NL (1) | NL182437C (2) |
| WO (1) | WO1980000896A1 (2) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| HU201421B (en) * | 1987-01-23 | 1990-10-28 | Tungsram Reszvenytarsasag | Method for pumping low-pressure gas-discharge light source |
| US5496201A (en) * | 1994-06-16 | 1996-03-05 | Industrial Technology Research Institute | Extendable exhausting assembly for the manufacture of gas discharge lamps |
| US7063583B2 (en) * | 2001-03-23 | 2006-06-20 | Wafermasters, Inc. | Multi-spectral uniform light source |
| JP4584722B2 (ja) * | 2005-01-13 | 2010-11-24 | シャープ株式会社 | プラズマ処理装置および同装置により製造された半導体素子 |
| JP2007042557A (ja) * | 2005-08-05 | 2007-02-15 | Matsushita Electric Ind Co Ltd | プラズマディスプレイパネルの製造装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2215100A (en) * | 1937-05-22 | 1940-09-17 | Westinghouse Electric & Mfg Co | Method and machine for sealing vitreous vessels |
| US2542636A (en) * | 1947-12-08 | 1951-02-20 | Gen Electric | Gas charging apparatus with gas pressure reducing valve |
| US2755005A (en) * | 1952-12-31 | 1956-07-17 | Sylvania Electric Prod | Method of exhausting and filling electric gaseous discharge devices |
| US3598518A (en) * | 1967-04-11 | 1971-08-10 | Tokyo Shibaura Electric Co | Method of providing a container with an oxygen-free gas |
| US3589790A (en) * | 1968-11-13 | 1971-06-29 | Westinghouse Electric Corp | Method of dosing a halogen cycle incandescent lamp |
| US3967871A (en) * | 1972-06-23 | 1976-07-06 | Egyesult Izzolampa Es Villamossagi Resvenytarsasag | Process for manufacturing tubeless vacuum electric discharge lamps |
| JPS5157973A (ja) * | 1974-11-15 | 1976-05-20 | Hitachi Ltd | Teiatsuhodenranpunoseizohoho |
-
1978
- 1978-10-13 JP JP12586678A patent/JPS5553043A/ja active Granted
-
1979
- 1979-10-11 GB GB8017627A patent/GB2046989B/en not_active Expired
- 1979-10-11 DE DE2953247A patent/DE2953247C1/de not_active Expired
- 1979-10-11 US US06/196,763 patent/US4364617A/en not_active Expired - Lifetime
- 1979-10-11 NL NLAANVRAGE7920081,A patent/NL182437C/xx not_active IP Right Cessation
- 1979-10-11 DE DE792953247T patent/DE2953247A1/de active Pending
- 1979-10-11 WO PCT/JP1979/000258 patent/WO1980000896A1/ja not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| WO1980000896A1 (fr) | 1980-05-01 |
| NL7920081A (nl) | 1980-08-29 |
| DE2953247A1 (de) | 1980-12-18 |
| NL182437C (nl) | 1988-03-01 |
| NL182437B (nl) | 1987-10-01 |
| DE2953247C1 (de) | 1983-08-18 |
| JPS5553043A (en) | 1980-04-18 |
| GB2046989B (en) | 1982-12-15 |
| US4364617A (en) | 1982-12-21 |
| GB2046989A (en) | 1980-11-19 |
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