JPS62166627U - - Google Patents
Info
- Publication number
- JPS62166627U JPS62166627U JP5507486U JP5507486U JPS62166627U JP S62166627 U JPS62166627 U JP S62166627U JP 5507486 U JP5507486 U JP 5507486U JP 5507486 U JP5507486 U JP 5507486U JP S62166627 U JPS62166627 U JP S62166627U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- vacuum
- ions
- gas inlet
- partition wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 claims 2
- 239000002245 particle Substances 0.000 claims 1
- 239000000843 powder Substances 0.000 claims 1
Landscapes
- Cleaning In General (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5507486U JPS62166627U (de) | 1986-04-11 | 1986-04-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5507486U JPS62166627U (de) | 1986-04-11 | 1986-04-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62166627U true JPS62166627U (de) | 1987-10-22 |
Family
ID=30882649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5507486U Pending JPS62166627U (de) | 1986-04-11 | 1986-04-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62166627U (de) |
-
1986
- 1986-04-11 JP JP5507486U patent/JPS62166627U/ja active Pending
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