JPS62167874U - - Google Patents
Info
- Publication number
- JPS62167874U JPS62167874U JP5511886U JP5511886U JPS62167874U JP S62167874 U JPS62167874 U JP S62167874U JP 5511886 U JP5511886 U JP 5511886U JP 5511886 U JP5511886 U JP 5511886U JP S62167874 U JPS62167874 U JP S62167874U
- Authority
- JP
- Japan
- Prior art keywords
- blind
- cryopump
- wall
- cryopanel
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5511886U JPS62167874U (lt) | 1986-04-12 | 1986-04-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5511886U JPS62167874U (lt) | 1986-04-12 | 1986-04-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62167874U true JPS62167874U (lt) | 1987-10-24 |
Family
ID=30882731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5511886U Pending JPS62167874U (lt) | 1986-04-12 | 1986-04-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62167874U (lt) |
-
1986
- 1986-04-12 JP JP5511886U patent/JPS62167874U/ja active Pending
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