JPS62170627U - - Google Patents

Info

Publication number
JPS62170627U
JPS62170627U JP5832186U JP5832186U JPS62170627U JP S62170627 U JPS62170627 U JP S62170627U JP 5832186 U JP5832186 U JP 5832186U JP 5832186 U JP5832186 U JP 5832186U JP S62170627 U JPS62170627 U JP S62170627U
Authority
JP
Japan
Prior art keywords
susceptor
metal material
carbon
utility
vapor phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5832186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5832186U priority Critical patent/JPS62170627U/ja
Publication of JPS62170627U publication Critical patent/JPS62170627U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP5832186U 1986-04-17 1986-04-17 Pending JPS62170627U (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5832186U JPS62170627U (2) 1986-04-17 1986-04-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5832186U JPS62170627U (2) 1986-04-17 1986-04-17

Publications (1)

Publication Number Publication Date
JPS62170627U true JPS62170627U (2) 1987-10-29

Family

ID=30888790

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5832186U Pending JPS62170627U (2) 1986-04-17 1986-04-17

Country Status (1)

Country Link
JP (1) JPS62170627U (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH029425U (2) * 1988-07-01 1990-01-22

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH029425U (2) * 1988-07-01 1990-01-22

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