JPS62172035U - - Google Patents
Info
- Publication number
- JPS62172035U JPS62172035U JP1986049166U JP4916686U JPS62172035U JP S62172035 U JPS62172035 U JP S62172035U JP 1986049166 U JP1986049166 U JP 1986049166U JP 4916686 U JP4916686 U JP 4916686U JP S62172035 U JPS62172035 U JP S62172035U
- Authority
- JP
- Japan
- Prior art keywords
- spraying
- nozzle
- application
- supplying
- organic chemical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Laminated Bodies (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986049166U JPS62172035U (mo) | 1986-04-02 | 1986-04-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986049166U JPS62172035U (mo) | 1986-04-02 | 1986-04-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62172035U true JPS62172035U (mo) | 1987-10-31 |
Family
ID=30871364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986049166U Pending JPS62172035U (mo) | 1986-04-02 | 1986-04-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62172035U (mo) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005311098A (ja) * | 2004-04-22 | 2005-11-04 | Toppan Printing Co Ltd | レジスト吐出装置及びそれを用いたレジスト塗布装置及びレジスト塗布方法 |
-
1986
- 1986-04-02 JP JP1986049166U patent/JPS62172035U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005311098A (ja) * | 2004-04-22 | 2005-11-04 | Toppan Printing Co Ltd | レジスト吐出装置及びそれを用いたレジスト塗布装置及びレジスト塗布方法 |