JPS62172036A - プラズマ処理装置 - Google Patents

プラズマ処理装置

Info

Publication number
JPS62172036A
JPS62172036A JP1369686A JP1369686A JPS62172036A JP S62172036 A JPS62172036 A JP S62172036A JP 1369686 A JP1369686 A JP 1369686A JP 1369686 A JP1369686 A JP 1369686A JP S62172036 A JPS62172036 A JP S62172036A
Authority
JP
Japan
Prior art keywords
plasma
processing
guide
processing apparatus
treating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1369686A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0334777B2 (2
Inventor
Hidehiro Okamoto
岡本　秀宏
Katsumi Hasegawa
勝美 長谷川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP1369686A priority Critical patent/JPS62172036A/ja
Publication of JPS62172036A publication Critical patent/JPS62172036A/ja
Publication of JPH0334777B2 publication Critical patent/JPH0334777B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
JP1369686A 1986-01-27 1986-01-27 プラズマ処理装置 Granted JPS62172036A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1369686A JPS62172036A (ja) 1986-01-27 1986-01-27 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1369686A JPS62172036A (ja) 1986-01-27 1986-01-27 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS62172036A true JPS62172036A (ja) 1987-07-29
JPH0334777B2 JPH0334777B2 (2) 1991-05-23

Family

ID=11840357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1369686A Granted JPS62172036A (ja) 1986-01-27 1986-01-27 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS62172036A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62174235A (ja) * 1986-01-28 1987-07-31 Toray Ind Inc 長尺物用プラズマ処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60149441A (ja) * 1984-01-17 1985-08-06 Kuraray Co Ltd プラズマ処理方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60149441A (ja) * 1984-01-17 1985-08-06 Kuraray Co Ltd プラズマ処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62174235A (ja) * 1986-01-28 1987-07-31 Toray Ind Inc 長尺物用プラズマ処理装置

Also Published As

Publication number Publication date
JPH0334777B2 (2) 1991-05-23

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees