JPS62172152U - - Google Patents
Info
- Publication number
- JPS62172152U JPS62172152U JP6122686U JP6122686U JPS62172152U JP S62172152 U JPS62172152 U JP S62172152U JP 6122686 U JP6122686 U JP 6122686U JP 6122686 U JP6122686 U JP 6122686U JP S62172152 U JPS62172152 U JP S62172152U
- Authority
- JP
- Japan
- Prior art keywords
- steel wire
- ink fountain
- driving
- pulse motor
- chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910000831 Steel Inorganic materials 0.000 claims 5
- 239000010959 steel Substances 0.000 claims 5
- 230000007547 defect Effects 0.000 claims 1
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 238000007689 inspection Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図はこの考案の一実施例を示す構成図、第
２図は従来装置の構成図である。図中、１はステ
ージ、２はウエハ、２ａはチツプ、５はインクつ
ぼ、６はステンレス芯、７は電磁石、７ａは可動
鉄心、９は調整ねじ、１０は判定手段、１１は第
１のパルスモータ、１２はテーブル、１３は第２
のパルスモータである。なお各図中同一符号は同
一又は相当部分を示す。
FIG. 1 is a block diagram showing an embodiment of this invention, and FIG. 2 is a block diagram of a conventional device. In the figure, 1 is a stage, 2 is a wafer, 2a is a chip, 5 is an inkwell, 6 is a stainless steel core, 7 is an electromagnet, 7a is a movable iron core, 9 is an adjustment screw, 10 is a determination means, and 11 is a first pulse Motor, 12 is table, 13 is second
This is a pulse motor. Note that the same reference numerals in each figure indicate the same or equivalent parts.
Claims (1)
先端開口部が対向するインクつぼ、このインクつ
ぼ内に配置された鋼線、チツプの良否を判定する
判定手段、この判定手段からの不良信号に基づき
上記鋼線の先端を移動して上記チツプにマーキン
グさせる鋼線駆動手段、上記インクつぼに対する
上記鋼線の挿入寸法を調整する調整ねじ、この調
整ねじを回転駆動する第１のパルスモータ、上記
インクつぼと上記鋼線駆動手段と上記調整ねじと
上記第１のパルスモータを一体的に三次元的に駆
動させる駆動テーブル、この駆動テーブルを駆動
させる第２のパルスモータを備えた半導体装置の
検査装置。 A wafer placed on a stage, an ink fountain whose tip opening faces the wafer, a steel wire placed in the ink fountain, a determining means for determining the quality of the chip, and a defect signal from the determining means. A steel wire driving means for moving the tip of the steel wire to mark the chip, an adjusting screw for adjusting the insertion dimension of the steel wire into the ink fountain, a first pulse motor for rotationally driving the adjusting screw, and the ink fountain. A semiconductor device inspection apparatus comprising: a drive table for integrally driving the steel wire drive means, the adjustment screw, and the first pulse motor three-dimensionally; and a second pulse motor for driving the drive table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6122686U JPS62172152U (en) | 1986-04-23 | 1986-04-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6122686U JPS62172152U (en) | 1986-04-23 | 1986-04-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62172152U true JPS62172152U (en) | 1987-10-31 |
Family
ID=30894364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6122686U Pending JPS62172152U (en) | 1986-04-23 | 1986-04-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62172152U (en) |
-
1986
- 1986-04-23 JP JP6122686U patent/JPS62172152U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS62172152U (en) | ||
| JPS6024058U (en) | Sample moving device | |
| JPS6370064U (en) | ||
| JPS59106046U (en) | Specimen polishing device | |
| JPS6065607U (en) | Coaxiality measuring instrument | |
| JPS6053U (en) | Processing equipment for hollow thin-walled rotating bodies | |
| JPS5928442U (en) | Machine Tools | |
| JPH0369235U (en) | ||
| JPS5859512U (en) | Workpiece double center hole drilling machine | |
| JPH0323935U (en) | ||
| JPH01139431U (en) | ||
| JPS6352170U (en) | ||
| JPS6098008U (en) | Tool length measuring device | |
| JPS5858339U (en) | wafer prober | |
| JPS5964582U (en) | circuit board inspection machine | |
| JPH01110356U (en) | ||
| JPS61192445U (en) | ||
| JPS6235232U (en) | ||
| JPS61132776U (en) | ||
| JPS63139566U (en) | ||
| JPS62182457U (en) | ||
| JPS59102297U (en) | Press machine control device | |
| JPS61132678U (en) | ||
| JPS6310001U (en) | ||
| JPS58184251U (en) | Roll hanging device |