JPS62174235A - 長尺物用プラズマ処理装置 - Google Patents

長尺物用プラズマ処理装置

Info

Publication number
JPS62174235A
JPS62174235A JP1481886A JP1481886A JPS62174235A JP S62174235 A JPS62174235 A JP S62174235A JP 1481886 A JP1481886 A JP 1481886A JP 1481886 A JP1481886 A JP 1481886A JP S62174235 A JPS62174235 A JP S62174235A
Authority
JP
Japan
Prior art keywords
processing
plasma
reduced pressure
electrode
path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1481886A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0441701B2 (2
Inventor
Hidehiro Okamoto
岡本　秀宏
Katsumi Hasegawa
勝美 長谷川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP1481886A priority Critical patent/JPS62174235A/ja
Publication of JPS62174235A publication Critical patent/JPS62174235A/ja
Publication of JPH0441701B2 publication Critical patent/JPH0441701B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
JP1481886A 1986-01-28 1986-01-28 長尺物用プラズマ処理装置 Granted JPS62174235A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1481886A JPS62174235A (ja) 1986-01-28 1986-01-28 長尺物用プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1481886A JPS62174235A (ja) 1986-01-28 1986-01-28 長尺物用プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS62174235A true JPS62174235A (ja) 1987-07-31
JPH0441701B2 JPH0441701B2 (2) 1992-07-09

Family

ID=11871621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1481886A Granted JPS62174235A (ja) 1986-01-28 1986-01-28 長尺物用プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS62174235A (2)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100414130B1 (ko) * 2001-08-31 2004-01-07 주식회사제4기한국 저온 저압 플라즈마를 이용한 섬유 표면개질 장치 및 그방법
KR100763018B1 (ko) 2006-10-17 2007-10-04 주식회사 다원시스 원단에 전도성을 갖게 하는 장치 및 방법
KR20220153451A (ko) * 2021-05-11 2022-11-18 박영희 원단표면 개질을 위한 저온진공 플라스마장치의 전극구조

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62172036A (ja) * 1986-01-27 1987-07-29 Toray Ind Inc プラズマ処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62172036A (ja) * 1986-01-27 1987-07-29 Toray Ind Inc プラズマ処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100414130B1 (ko) * 2001-08-31 2004-01-07 주식회사제4기한국 저온 저압 플라즈마를 이용한 섬유 표면개질 장치 및 그방법
KR100763018B1 (ko) 2006-10-17 2007-10-04 주식회사 다원시스 원단에 전도성을 갖게 하는 장치 및 방법
KR20220153451A (ko) * 2021-05-11 2022-11-18 박영희 원단표면 개질을 위한 저온진공 플라스마장치의 전극구조

Also Published As

Publication number Publication date
JPH0441701B2 (2) 1992-07-09

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