JPS6217593U - - Google Patents

Info

Publication number
JPS6217593U
JPS6217593U JP10809885U JP10809885U JPS6217593U JP S6217593 U JPS6217593 U JP S6217593U JP 10809885 U JP10809885 U JP 10809885U JP 10809885 U JP10809885 U JP 10809885U JP S6217593 U JPS6217593 U JP S6217593U
Authority
JP
Japan
Prior art keywords
recess
parallel
plates
vacuum
parallel plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10809885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0237757Y2 (
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10809885U priority Critical patent/JPH0237757Y2/ja
Publication of JPS6217593U publication Critical patent/JPS6217593U/ja
Application granted granted Critical
Publication of JPH0237757Y2 publication Critical patent/JPH0237757Y2/ja
Expired legal-status Critical Current

Links

JP10809885U 1985-07-17 1985-07-17 Expired JPH0237757Y2 ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10809885U JPH0237757Y2 ( ) 1985-07-17 1985-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10809885U JPH0237757Y2 ( ) 1985-07-17 1985-07-17

Publications (2)

Publication Number Publication Date
JPS6217593U true JPS6217593U ( ) 1987-02-02
JPH0237757Y2 JPH0237757Y2 ( ) 1990-10-12

Family

ID=30984974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10809885U Expired JPH0237757Y2 ( ) 1985-07-17 1985-07-17

Country Status (1)

Country Link
JP (1) JPH0237757Y2 ( )

Also Published As

Publication number Publication date
JPH0237757Y2 ( ) 1990-10-12

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