JPS62186226U - - Google Patents
Info
- Publication number
- JPS62186226U JPS62186226U JP7088386U JP7088386U JPS62186226U JP S62186226 U JPS62186226 U JP S62186226U JP 7088386 U JP7088386 U JP 7088386U JP 7088386 U JP7088386 U JP 7088386U JP S62186226 U JPS62186226 U JP S62186226U
- Authority
- JP
- Japan
- Prior art keywords
- optical head
- measuring device
- suction hole
- vacuum
- vacuum suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Optical Head (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7088386U JPS62186226U (2) | 1986-05-12 | 1986-05-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7088386U JPS62186226U (2) | 1986-05-12 | 1986-05-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186226U true JPS62186226U (2) | 1987-11-26 |
Family
ID=30912927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7088386U Pending JPS62186226U (2) | 1986-05-12 | 1986-05-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186226U (2) |
-
1986
- 1986-05-12 JP JP7088386U patent/JPS62186226U/ja active Pending
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