JPS62186356U - - Google Patents
Info
- Publication number
- JPS62186356U JPS62186356U JP7268886U JP7268886U JPS62186356U JP S62186356 U JPS62186356 U JP S62186356U JP 7268886 U JP7268886 U JP 7268886U JP 7268886 U JP7268886 U JP 7268886U JP S62186356 U JPS62186356 U JP S62186356U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- arc chamber
- ion source
- reel
- thermionic electrons
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7268886U JPS62186356U (de) | 1986-05-16 | 1986-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7268886U JPS62186356U (de) | 1986-05-16 | 1986-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186356U true JPS62186356U (de) | 1987-11-27 |
Family
ID=30916361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7268886U Pending JPS62186356U (de) | 1986-05-16 | 1986-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186356U (de) |
-
1986
- 1986-05-16 JP JP7268886U patent/JPS62186356U/ja active Pending
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