JPS62188567U - - Google Patents

Info

Publication number
JPS62188567U
JPS62188567U JP7614786U JP7614786U JPS62188567U JP S62188567 U JPS62188567 U JP S62188567U JP 7614786 U JP7614786 U JP 7614786U JP 7614786 U JP7614786 U JP 7614786U JP S62188567 U JPS62188567 U JP S62188567U
Authority
JP
Japan
Prior art keywords
vacuum pump
stage side
exhaust port
passageway
suction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7614786U
Other languages
English (en)
Other versions
JPH0229259Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7614786U priority Critical patent/JPH0229259Y2/ja
Publication of JPS62188567U publication Critical patent/JPS62188567U/ja
Application granted granted Critical
Publication of JPH0229259Y2 publication Critical patent/JPH0229259Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係る真空ポンプの横断面図、
第２図は弁装置の詳細図である。 １…一段側真空ポンプ、１１…二段側真空ポン
プ、２４…一段側真空ポンプの排気口、２５…二
段側真空ポンプの吸気口、２６…通路、２９…隔
壁、３５…連通孔、３６…弁装置。

Claims (1)

  1. 【実用新案登録請求の範囲】 一段側の真空ポンプと、 該一段側の真空ポンプよりも排気速度が小さい
    二段側の真空ポンプと、 前記一段側の真空ポンプの排気口と前記二段側
    の真空ポンプの吸入室に形成された吸気口とを接
    続する通路と、 該通路と二段側の真空ポンプにおける排気口側
    との間に設けられ該通路側の圧力に応じて前記排
    気口側で前記通路を大気に開放する弁装置と、を
    備えてなる真空ポンプ。
JP7614786U 1986-05-20 1986-05-20 Expired JPH0229259Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7614786U JPH0229259Y2 (ja) 1986-05-20 1986-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7614786U JPH0229259Y2 (ja) 1986-05-20 1986-05-20

Publications (2)

Publication Number Publication Date
JPS62188567U true JPS62188567U (ja) 1987-12-01
JPH0229259Y2 JPH0229259Y2 (ja) 1990-08-06

Family

ID=30922954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7614786U Expired JPH0229259Y2 (ja) 1986-05-20 1986-05-20

Country Status (1)

Country Link
JP (1) JPH0229259Y2 (ja)

Also Published As

Publication number Publication date
JPH0229259Y2 (ja) 1990-08-06

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