JPS62190251U - - Google Patents

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Publication number
JPS62190251U
JPS62190251U JP1986080005U JP8000586U JPS62190251U JP S62190251 U JPS62190251 U JP S62190251U JP 1986080005 U JP1986080005 U JP 1986080005U JP 8000586 U JP8000586 U JP 8000586U JP S62190251 U JPS62190251 U JP S62190251U
Authority
JP
Japan
Prior art keywords
case
photomask
photomask substrate
lower case
upper case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986080005U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986080005U priority Critical patent/JPS62190251U/ja
Publication of JPS62190251U publication Critical patent/JPS62190251U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は、本考案の一実施例の斜視図、第２図
ａは、別の実施例の側面図、第２図ｂは、同上の
平面図、第３図は、更に別の実施例の斜視図、第
４図は、変形例の側面図、第５図ａ乃至第５図ｄ
は固定構造の例を示す図である。 １…フオトマスクカセツト、１ａ…上ケース、
１ｂ…下ケース、４，５…透光窓、４ａ，５ａ…
透明膜、９…フオトマスク基板。

Claims (1)

    【実用新案登録請求の範囲】
  1. 透明膜の貼られた透光窓をそれぞれ有する上ケ
    ース及び下ケースと、上下両ケースの間にフオト
    マスク基板を固定する手段とを備え、固定された
    フオトマスク基板の両面を上ケースと下ケースで
    覆うように構成されたフオトマスクカセツト。
JP1986080005U 1986-05-26 1986-05-26 Pending JPS62190251U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986080005U JPS62190251U (ja) 1986-05-26 1986-05-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986080005U JPS62190251U (ja) 1986-05-26 1986-05-26

Publications (1)

Publication Number Publication Date
JPS62190251U true JPS62190251U (ja) 1987-12-03

Family

ID=30930412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986080005U Pending JPS62190251U (ja) 1986-05-26 1986-05-26

Country Status (1)

Country Link
JP (1) JPS62190251U (ja)

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