JPS62191866U - - Google Patents
Info
- Publication number
- JPS62191866U JPS62191866U JP7987686U JP7987686U JPS62191866U JP S62191866 U JPS62191866 U JP S62191866U JP 7987686 U JP7987686 U JP 7987686U JP 7987686 U JP7987686 U JP 7987686U JP S62191866 U JPS62191866 U JP S62191866U
- Authority
- JP
- Japan
- Prior art keywords
- cart
- vacuum
- engaging rod
- conveying
- guide member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000926 separation method Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7987686U JPS62191866U (it) | 1986-05-26 | 1986-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7987686U JPS62191866U (it) | 1986-05-26 | 1986-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62191866U true JPS62191866U (it) | 1987-12-05 |
Family
ID=30930160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7987686U Pending JPS62191866U (it) | 1986-05-26 | 1986-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62191866U (it) |
-
1986
- 1986-05-26 JP JP7987686U patent/JPS62191866U/ja active Pending
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