JPS62194740U - - Google Patents

Info

Publication number
JPS62194740U
JPS62194740U JP1986082531U JP8253186U JPS62194740U JP S62194740 U JPS62194740 U JP S62194740U JP 1986082531 U JP1986082531 U JP 1986082531U JP 8253186 U JP8253186 U JP 8253186U JP S62194740 U JPS62194740 U JP S62194740U
Authority
JP
Japan
Prior art keywords
light
shutter
ultraviolet
seat assembly
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986082531U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986082531U priority Critical patent/JPS62194740U/ja
Publication of JPS62194740U publication Critical patent/JPS62194740U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Adhesives Or Adhesive Processes (AREA)
JP1986082531U 1986-06-02 1986-06-02 Pending JPS62194740U (th)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986082531U JPS62194740U (th) 1986-06-02 1986-06-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986082531U JPS62194740U (th) 1986-06-02 1986-06-02

Publications (1)

Publication Number Publication Date
JPS62194740U true JPS62194740U (th) 1987-12-11

Family

ID=30935276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986082531U Pending JPS62194740U (th) 1986-06-02 1986-06-02

Country Status (1)

Country Link
JP (1) JPS62194740U (th)

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