JPS62195449U - - Google Patents
Info
- Publication number
- JPS62195449U JPS62195449U JP8417586U JP8417586U JPS62195449U JP S62195449 U JPS62195449 U JP S62195449U JP 8417586 U JP8417586 U JP 8417586U JP 8417586 U JP8417586 U JP 8417586U JP S62195449 U JPS62195449 U JP S62195449U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- storage container
- polishing liquid
- held
- main shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 15
- 239000007788 liquid Substances 0.000 claims description 7
- 238000003756 stirring Methods 0.000 claims description 6
- 238000013019 agitation Methods 0.000 claims 2
- 238000002347 injection Methods 0.000 claims 2
- 239000007924 injection Substances 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8417586U JPS62195449U (mo) | 1986-06-03 | 1986-06-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8417586U JPS62195449U (mo) | 1986-06-03 | 1986-06-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62195449U true JPS62195449U (mo) | 1987-12-12 |
Family
ID=30938435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8417586U Pending JPS62195449U (mo) | 1986-06-03 | 1986-06-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62195449U (mo) |
-
1986
- 1986-06-03 JP JP8417586U patent/JPS62195449U/ja active Pending
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