JPS62196335U - - Google Patents
Info
- Publication number
- JPS62196335U JPS62196335U JP1986082457U JP8245786U JPS62196335U JP S62196335 U JPS62196335 U JP S62196335U JP 1986082457 U JP1986082457 U JP 1986082457U JP 8245786 U JP8245786 U JP 8245786U JP S62196335 U JPS62196335 U JP S62196335U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- heat treatment
- core tube
- treatment apparatus
- furnace core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986082457U JPS62196335U (da) | 1986-06-02 | 1986-06-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986082457U JPS62196335U (da) | 1986-06-02 | 1986-06-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62196335U true JPS62196335U (da) | 1987-12-14 |
Family
ID=30935133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986082457U Pending JPS62196335U (da) | 1986-06-02 | 1986-06-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62196335U (da) |
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1986
- 1986-06-02 JP JP1986082457U patent/JPS62196335U/ja active Pending