JPS62201097U - - Google Patents

Info

Publication number
JPS62201097U
JPS62201097U JP1986090281U JP9028186U JPS62201097U JP S62201097 U JPS62201097 U JP S62201097U JP 1986090281 U JP1986090281 U JP 1986090281U JP 9028186 U JP9028186 U JP 9028186U JP S62201097 U JPS62201097 U JP S62201097U
Authority
JP
Japan
Prior art keywords
surface plate
elastic support
precision processing
model registration
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986090281U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0348557Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986090281U priority Critical patent/JPH0348557Y2/ja
Publication of JPS62201097U publication Critical patent/JPS62201097U/ja
Application granted granted Critical
Publication of JPH0348557Y2 publication Critical patent/JPH0348557Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
JP1986090281U 1986-06-13 1986-06-13 Expired JPH0348557Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986090281U JPH0348557Y2 (cs) 1986-06-13 1986-06-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986090281U JPH0348557Y2 (cs) 1986-06-13 1986-06-13

Publications (2)

Publication Number Publication Date
JPS62201097U true JPS62201097U (cs) 1987-12-22
JPH0348557Y2 JPH0348557Y2 (cs) 1991-10-16

Family

ID=30949996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986090281U Expired JPH0348557Y2 (cs) 1986-06-13 1986-06-13

Country Status (1)

Country Link
JP (1) JPH0348557Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007214449A (ja) * 2006-02-10 2007-08-23 Ushio Inc XYθ移動ステージ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007214449A (ja) * 2006-02-10 2007-08-23 Ushio Inc XYθ移動ステージ

Also Published As

Publication number Publication date
JPH0348557Y2 (cs) 1991-10-16

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