JPS62215880A - Magnetic responsive element - Google Patents
Magnetic responsive elementInfo
- Publication number
- JPS62215880A JPS62215880A JP6042386A JP6042386A JPS62215880A JP S62215880 A JPS62215880 A JP S62215880A JP 6042386 A JP6042386 A JP 6042386A JP 6042386 A JP6042386 A JP 6042386A JP S62215880 A JPS62215880 A JP S62215880A
- Authority
- JP
- Japan
- Prior art keywords
- alloy wire
- amorphous alloy
- voltage
- fixing ends
- wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
本発明は交流磁界中でパルス電圧を発生する磁歪性の非
晶質合金線を用いた磁気感応素子に関する。The present invention relates to a magnetic sensing element using a magnetostrictive amorphous alloy wire that generates a pulse voltage in an alternating magnetic field.
一定周波数の電流を流した励磁コイルの中に、ねじり応
力を加えたFe−Ni系合金のヴイーガンド線を置くこ
とにより、励磁コイルの交流電圧に同期してヴイーガン
ド線の両端に電圧パルスを発生させる素子が以前から知
られている。この素子に作用する外部磁界の強さによっ
てパルスの出力状態が変化するので、この変化をとらえ
て磁界を感知することができる。しかし、ヴイーガンド
線のような結晶1r磁性体では磁歪効果が小さいために
高い励磁振幅の交流磁界を必要とする上に、鋭いパルス
が得られないという点が実用上の障害となっている。
これに対して磁歪性非晶質合金線は磁歪常数が大きく、
また強度が高いから大きなねじり応力を付加しやすく、
微小な交!磁界にもよく惑応し、鋭いパルス電圧を発生
するので磁気感応素子として用いるのに適している。こ
のような非晶質合金線は溶湯から超急冷することにより
製造されるものであり、凝固時にすでに表層部にねじり
残留応力が生じているので、製造された状態のままでも
交流磁界に置けば、パルス電圧を発生させることはでき
るが、製造時の残留応力は非晶質合金線に一様な大きさ
で生ずることはないから、パルス電圧を発生させるため
の好ましい応力状態とはなっておらず、十分な出力値が
得られない。したがって非晶質合金線の製造後に焼鈍し
て残留応力を緩和させた後、適切なねじり応力を付与す
ることにより磁気感応素子として高レベルの安定な出力
を(するようにするのが効果的である。
一方このような磁気感応素子に対しては、小さなコイル
?lH+tで高い電圧のパルスが得られることが望まし
く、例えば電気学会マグネティンクス研究会資料MAC
;84−95に記載されているように、パルス電圧の大
きさは非晶質合金線の長さに比例するので大きなパルス
電圧を発生させるためにはできるだけ長い非晶質合金線
を用いてねじり応力を与えることが効果的であることも
知られている。
しかし、非晶質合金線を長(することは、素子を小型化
したいという要求に反するものであり、応用範囲を狭く
するので好ましくない、この点を解決するために本発明
者らは短く切断した非晶質合金線の必要な本数を、絶縁
基板上に互いに平行となるように配置し、それらを別の
導体で直列に接続した素子を特願昭60−166177
号として出願中である。
しかしながら、本発明者らはその後の研究により、非晶
質合金線は元来非晶質化を促進させる元素として硼素(
B)や珪素(Sl)などを含有しているので溶接やろう
付けなどの冶金的な接合性に劣るために、とくにねじら
れた状態で接合する場合、接合部には常にねじリカが作
用し、必ずしも信頼性の高い接合状態が得られないこと
が判明した。
したがって非晶質合金線の溶・ろう接などによる接合個
所をもたない磁気感応素子とすることが望まれる。By placing a torsionally stressed Fe-Ni alloy Veegand wire in an excitation coil through which a current at a constant frequency is passed, voltage pulses are generated at both ends of the Wiegand wire in synchronization with the AC voltage of the excitation coil. elements have been known for a long time. Since the output state of the pulse changes depending on the strength of the external magnetic field acting on this element, the magnetic field can be sensed by capturing this change. However, crystalline 1R magnetic materials such as Wiegand wires have a small magnetostrictive effect, so they require an alternating current magnetic field with a high excitation amplitude, and the fact that sharp pulses cannot be obtained is a practical obstacle. On the other hand, magnetostrictive amorphous alloy wire has a large magnetostriction constant;
In addition, because of its high strength, it is easy to apply large torsional stress,
Minute intersection! It responds well to magnetic fields and generates sharp pulse voltages, making it suitable for use as a magnetically sensitive element. Such amorphous alloy wire is manufactured by ultra-rapid cooling from molten metal, and since torsional residual stress has already been generated in the surface layer during solidification, even if it is in the manufactured state, it will be exposed to an alternating magnetic field. , it is possible to generate a pulse voltage, but the residual stress during manufacturing does not occur with a uniform magnitude in the amorphous alloy wire, so this is not a preferable stress state for generating a pulse voltage. Therefore, sufficient output value cannot be obtained. Therefore, it is effective to anneale the amorphous alloy wire after manufacturing it to relieve the residual stress, and then apply appropriate torsional stress to produce a stable output at a high level as a magnetic sensing element. On the other hand, for such a magnetic sensing element, it is desirable to be able to obtain high voltage pulses with a small coil ?lH+t.
As described in 84-95, the magnitude of the pulse voltage is proportional to the length of the amorphous alloy wire, so in order to generate a large pulse voltage, it is necessary to use as long an amorphous alloy wire as possible and twist it. It is also known that applying stress is effective. However, making the amorphous alloy wire long goes against the demand for miniaturization of the device and is undesirable because it narrows the range of applications.To solve this problem, the inventors cut the amorphous alloy wire short. The required number of amorphous alloy wires are arranged parallel to each other on an insulating substrate and connected in series with another conductor.
The application is currently being filed as a No. However, the inventors' subsequent research revealed that boron (
Since it contains B) and silicon (Sl), it is inferior in metallurgical joining properties such as welding and brazing, so when joining in a twisted state, screw liquid always acts on the joint. However, it has been found that a highly reliable bonded state cannot always be obtained. Therefore, it is desirable to have a magnetically sensitive element that does not have any joints such as melting or brazing of amorphous alloy wires.
本発明は上述の点に鑑みなされたものであり、その目的
は、出力パルス電圧が高く、小型で信頼性のすぐれた磁
歪性の非晶質合金線を用いた磁気感応素子を提供するこ
とにある。The present invention has been made in view of the above points, and its purpose is to provide a magnetic sensing element using a magnetostrictive amorphous alloy wire, which has a high output pulse voltage, is small in size, and has excellent reliability. be.
本発明は非晶質合金線を絶縁基体上の一固定端から最終
固定端までを一方向にねじりながら引き廻す途中で非晶
質合金線の進む方向を複数個所で反転させることにより
、磁界方向に対してねじり方向が反転し、その結果出力
電圧パルスの掻性が反転する複数の非晶質合金線領域が
形成され、両固定端間に各領域の電圧が加算された出力
電圧を接合部を設けることなく、小型で信頼性にすぐれ
た磁気感応素子が得られるようにしたものである。In the present invention, the amorphous alloy wire is twisted in one direction from one fixed end to the final fixed end on an insulating substrate, and the direction of the magnetic field is reversed at multiple points. A plurality of amorphous alloy wire regions are formed in which the twisting direction is reversed, and as a result, the scratchiness of the output voltage pulse is reversed. This makes it possible to obtain a small and highly reliable magnetic sensing element without the need for a magnetic sensor.
以下本発明を実施例に基づき説明する。
第1図は本発明による磁気感応素子の要部斜視図である
。第1図はアルミナ基体lの表面に例えばFe B
−3i系合金からなる磁歪性非晶質合金線2を二つの固
定Q 3 aと3bの間に緩みなく張り渡したものであ
るが、非晶質合金線2は固定端3aと3bの間でさらに
方向反転手段4a、 4b、 4cを介在させて複数の
短い線の領域をジグザグ状に形成している。この固定端
3a、 3bはスリットを有するピンであり、方向反転
手段4a、 4b、 4cも同様のピンであるがスリッ
トはなく、これらのピンはいずれも基体1の所定の位置
にあらかじめ埋め込んでおく。
この素子を作製するにはまず固定端の一つ3aの埋込ビ
ンのスリットに非晶質合金線2の一端を挟んで固定端3
aをかしめることにより固定し、次いで非晶質合金線2
を一方向にねじりながら、方向反転手段4aのピンの外
周に沿うように引張り、引き続き同方向にねじりながら
方向反転手段4bのピンの外周に達した後、同様にねじ
りを与えつつピン4cを同周してもう一つの固定端のピ
ン3bに達したとき3bのスリットで非晶質合金線2の
他端をかしめて固定し、全体が同一方向にねじられた非
晶質合金線2が、それぞれ各ピンによって区分された短
い線の領域を有してジグザグ状に張り廻されるようにす
る。非晶質合金vA2のねじり方向を点線の矢印で示し
た。この際固定fa3a、 3bと方向反転手段となる
各埋込ピン4a、 4b、 4cの位置と個数は所望の
パルス電圧が得られるように随意に設定すればよい、な
おこれらの埋込ピンは基体lの所定位置に孔をあけてお
き、その孔の内面をメタライズした後、例えば燐青銅な
どのピンを挿入してはんだ付けすることにより、各ピン
を基体1に強固に埋め込むことができる。
このように構成した素子に実線の矢印で方向を示した磁
界Hが作用すると、例えばピン4aに関しては、その両
側の線分すなわち3aと4a間、4aと4b間にそれぞ
れ区分された非晶質合金線2は互いに極性が反対の電圧
パルスが発生する。この関係は第1図中にe→■で表わ
したように線分3a4aの極性は3aが負、4aが正で
あり、線分4a4b間の極性は4aが負、4bが正とな
る。このことは非晶質合金線2の方向反転手段である他
の埋込ピン4b、 4cについても同様の関係となる。
したがって非晶質合金線2の全長である3aと3b間に
は各線分間の電圧パルスを加算した電圧パルスが発生す
る。また第1図では基体1の一表面に非晶質合金線2を
配した場合を示したが、必要に応じてその裏面にも同様
にして非晶質合金線をジグザグ状に設け、表裏両面の非
晶質合金線を直列に接続した素子とすることができる。
第2図は本発明のもう一つの実施例を示した磁気感応素
子の要部斜視図であり、第1図と共通部材を同一符号で
表わしである。第2図において例えばアルミナ製の基体
l上に埋め込まれ、それぞれスリットを有するピンから
なる二つの固定端3aと3b間に非晶質合金線2をねじ
りながら固定することは第1図と同じであるが、第2図
が第1図と異なる所は第2図では固定端3aで一端をが
しめた非晶質合金線2をねしりながら基体lを巻きつけ
るようにしてジグザグ状に張り廻し他端を固定端3bで
固定しであることであり、非晶質合金線2の進行方向を
反転させる手段は基体1の両側面の厚さ方向に設けた溝
5a、 5b、 5c、 5dによって行なわれる。す
なわち、第1図では非晶質合金線2は基体1に対して平
面的配置であり第2図のものは立体的な配置としである
。第2図の場合も点線の矢印で表わした非晶質合金線2
のねしり方向は磁界の方向Hを基準にすると基板表裏の
往復で反転しており、第1図の場合と同様に固定端3a
と3b間には非晶質合金vA2の全長に対応する電圧の
パルスが発生する。
以上第1図、第2図のごとく本発明では非晶質合金線2
のねじり応力が巧みに使われている。すなわち、磁界方
向Hに対して非晶質合金!1112は、それぞれ区分さ
れた線分同志は互いにねじり方向が逆向きとなるが、出
力電圧パルスの極性も反転するので、非晶質合金線2を
一端からねじりながら方向反転手段4a〜4cまたは5
a〜5dで折り曲げて基体1上にジグザグ状に張り渡し
、終端を固定すれば、磁界方向l(を基準としてねじり
方向が逆になるい(つかの線分が自動的に得られ、結果
的に非晶質合金線2の両端3aと3b間では各線分の電
圧が加算された出力電圧としてとり出すことができる。
したがって1本の非晶質合金線2の両◇ツは近い距離に
設けることができ、大きな設置面禎を必賀とせず得られ
る素子はコンパクトなものとなるだけでなく、非晶質合
金線2が全長にわたって接合部を持たないから、接合の
ためにねじり応力が緩和して特性の経時変化を生したり
、接合の失敗により歩留りが低下することなどがなく、
高い信鎖性が得られる。
さらに基体として円柱もしくは円筒状の絶縁物を用いそ
の表面に上述の手法により非晶質合金線をジグザグ状に
設けるようにすれば、その基体はコイルを巻いて磁場を
発生させるための芯材として共通に使用できるという利
点もある。
なお基体は線間の短絡を防ぐために絶縁物を用いるが、
アルミナのようなセラミックのほかにもガラスエポキシ
などを用いることができ、本発明の目的に適うものであ
れば導電性物質と絶縁物の複合材料を使用してもよい。
【発明の効果]
ねじり応力を加えた磁歪性非晶質合金線を用いた磁気感
応素子の出力電圧を高くするには非晶質合金線を長くす
る程よいが、素子を小型化することができず、また多数
の短い非晶質合金線を並べて直列に接続して用いるのは
接合部の信顛性に欠けるなどの問題に対して、本発明で
は実施例で説明したように基体上に両端を固定された1
本の非晶質合金線の途中に複数個のピンなど非晶質合金
腺の方向反転手段を介在させて非晶質合金線をねじりな
がら折り曲げを反覆して非晶質合金線全体がジグザグ状
となるように張り渡したため、両同定端の間に張った非
晶質合金線は全体のねじり方向が同じでも磁界方向に対
しては出力電圧の極性が反転するつくつかの線分に区分
され、画固定端間に生ずる電圧パルスは相殺されること
なく各線分間の電圧が加算された高い電圧のパルスを発
生させることができ、その結果得られた(■気惑応素子
は小型でノイズに強く後段における信号処理も容易であ
り、さらにこの非晶質合金線は全長にわたって接合個所
が全く存在しないから接合上の問題をM ンI Lでお
り、高い信頼性をイIするものとなる。The present invention will be explained below based on examples. FIG. 1 is a perspective view of essential parts of a magnetically sensitive element according to the present invention. Figure 1 shows that, for example, FeB is deposited on the surface of an alumina substrate l.
A magnetostrictive amorphous alloy wire 2 made of -3i alloy is stretched between two fixed ends Q3a and 3b without loosening, and the amorphous alloy wire 2 is stretched between fixed ends 3a and 3b. Further, direction reversing means 4a, 4b, and 4c are interposed to form a plurality of short line regions in a zigzag shape. These fixed ends 3a, 3b are pins with slits, and the direction reversing means 4a, 4b, 4c are also similar pins, but without slits, and these pins are all embedded in predetermined positions in the base 1 in advance. . To fabricate this element, first insert one end of the amorphous alloy wire 2 into the slit of the embedded bottle of one of the fixed ends 3a.
A is fixed by caulking, and then the amorphous alloy wire 2
While twisting in one direction, pull it along the outer periphery of the pin of the direction reversing means 4a, continue twisting in the same direction until it reaches the outer periphery of the pin of the direction reversing means 4b, and then pull the pin 4c while twisting in the same direction. When the pin 3b at the other fixed end is reached, the other end of the amorphous alloy wire 2 is caulked and fixed through the slit 3b, and the amorphous alloy wire 2 is twisted in the same direction as a whole. Each pin has a short line area separated by each pin so that it is stretched in a zigzag pattern. The twist direction of the amorphous alloy vA2 is indicated by a dotted arrow. At this time, the positions and numbers of the fixed fas 3a, 3b and the embedded pins 4a, 4b, 4c serving as direction reversing means may be set arbitrarily so as to obtain the desired pulse voltage. Each pin can be firmly embedded in the base 1 by drilling a hole at a predetermined position in the base 1, metallizing the inner surface of the hole, inserting a pin made of, for example, phosphor bronze and soldering it. When a magnetic field H whose direction is indicated by a solid arrow acts on the element configured in this way, for example, regarding the pin 4a, the amorphous material divided between the line segments on both sides of the pin 4a, that is, between 3a and 4a, and between 4a and 4b, respectively. Voltage pulses having opposite polarities are generated in the alloy wire 2. As shown by e→■ in FIG. 1, this relationship is such that the polarity of the line segment 3a4a is negative for 3a and positive for 4a, and the polarity between the line segments 4a4b is negative for 4a and positive for 4b. This holds true for the other embedded pins 4b and 4c, which are means for reversing the direction of the amorphous alloy wire 2. Therefore, a voltage pulse is generated between 3a and 3b along the entire length of the amorphous alloy wire 2, which is the sum of the voltage pulses for each line segment. In addition, although FIG. 1 shows the case where the amorphous alloy wire 2 is arranged on one surface of the base 1, if necessary, the amorphous alloy wire 2 can also be provided in a zigzag pattern on the back surface of the substrate 1 in the same manner. It is possible to form an element in which several amorphous alloy wires are connected in series. FIG. 2 is a perspective view of a main part of a magnetically sensitive element showing another embodiment of the present invention, in which common members to those in FIG. 1 are denoted by the same reference numerals. In Fig. 2, for example, the amorphous alloy wire 2 is fixed while being twisted between two fixed ends 3a and 3b, which are embedded in a base l made of alumina and are each made of a pin having a slit, as in Fig. 1. However, the difference between Fig. 2 and Fig. 1 is that in Fig. 2, the amorphous alloy wire 2 with one end tightened at the fixed end 3a is twisted and stretched around the base l in a zigzag pattern. The other end is fixed by a fixed end 3b, and the means for reversing the direction of movement of the amorphous alloy wire 2 is by grooves 5a, 5b, 5c, and 5d provided in the thickness direction on both sides of the base 1. It is done. That is, in FIG. 1, the amorphous alloy wire 2 is arranged planarly with respect to the base 1, and in FIG. 2, it is arranged three-dimensionally. In the case of Fig. 2, the amorphous alloy wire 2 is also indicated by the dotted arrow.
The twisting direction is reversed when the board goes back and forth between the front and back sides, with reference to the direction H of the magnetic field, and as in the case of Fig. 1, the fixed end 3a
A voltage pulse corresponding to the entire length of the amorphous alloy vA2 is generated between and 3b. As shown in FIGS. 1 and 2, in the present invention, the amorphous alloy wire 2
The torsional stress of is used skillfully. That is, an amorphous alloy with respect to the magnetic field direction H! 1112, the twisted directions of the divided line segments are opposite to each other, but the polarity of the output voltage pulse is also reversed, so the direction reversing means 4a to 4c or 5
If you bend it at points a to 5d, stretch it in a zigzag pattern on the base 1, and fix the end, the twist direction will be reversed based on the magnetic field direction l (some line segments will be automatically obtained, resulting in Between both ends 3a and 3b of the amorphous alloy wire 2, the output voltage can be obtained by adding the voltages of each line segment.Therefore, both ◇ of one amorphous alloy wire 2 are provided at a close distance. Not only can the resulting device be compact without requiring a large installation surface, but also the torsional stress due to bonding is alleviated because the amorphous alloy wire 2 does not have a joint over its entire length. There is no change in characteristics over time or a decrease in yield due to bonding failure.
High reliability can be obtained. Furthermore, if a cylindrical or cylindrical insulator is used as a base and amorphous alloy wires are provided on its surface in a zigzag pattern using the method described above, the base can be used as a core material for winding a coil and generating a magnetic field. Another advantage is that they can be used in common. Note that an insulator is used for the base to prevent short circuits between wires.
In addition to ceramics such as alumina, glass epoxy and the like may be used, and composite materials of a conductive substance and an insulator may also be used as long as they meet the purpose of the present invention. [Effect of the invention] In order to increase the output voltage of a magnetically sensitive element using a magnetostrictive amorphous alloy wire to which torsional stress is applied, it is better to make the amorphous alloy wire longer, but the element cannot be made smaller. In addition, in order to solve the problem that connecting a large number of short amorphous alloy wires in series results in a lack of reliability at the joint, in the present invention, as explained in the embodiment, both ends are connected on the substrate. Fixed 1
A means for reversing the direction of the amorphous alloy gland, such as a plurality of pins, is interposed in the middle of the amorphous alloy wire, and the amorphous alloy wire is twisted and bent repeatedly, so that the entire amorphous alloy wire has a zigzag shape. As a result, the amorphous alloy wire stretched between the two identified ends is divided into several line segments whose output voltage polarity is reversed with respect to the magnetic field direction, even though the overall twist direction is the same. , the voltage pulse generated between the fixed ends of the image was able to generate a high voltage pulse in which the voltage between each line was added without being canceled out. This amorphous alloy wire is strong and easy to process signals in subsequent stages.Furthermore, since this amorphous alloy wire has no bonding points over its entire length, there are no bonding problems, resulting in high reliability.
第1図は非晶質合金線を平面的に配置した本発明の磁気
感応素子を示した要部斜視図、第2I2Iは非晶質合金
線を立体的に配置した本発明の磁気感応素子を示した要
部斜視図である。
l;基体、2:非晶質合金線、313b:固定端、4a
、 4b、 4c :方向反転手段(ビン) 、5a、
5b、 5c。Fig. 1 is a perspective view of a main part of a magnetic sensing element of the present invention in which amorphous alloy wires are arranged in a two-dimensional manner, and Fig. 2I2I is a perspective view of a magnetic sensing element of the present invention in which amorphous alloy wires are arranged in a three-dimensional manner. It is a perspective view of the main part shown. l: Base, 2: Amorphous alloy wire, 313b: Fixed end, 4a
, 4b, 4c: direction reversal means (bin), 5a,
5b, 5c.
Claims (1)
にねじられた磁歪性非晶質合金線の途中に、この線をジ
グザグ状に張り渡す複数個の方向反転手段を設けたこと
を特徴とする磁気感応素子。 2)特許請求の範囲第1項記載の素子において、方向反
転手段は基体上に埋め込んだピンであることを特徴とす
る磁気感応素子。 3)特許請求の範囲第1項記載の素子において、方向反
転手段は基体側面に形成した溝であることを特徴とする
磁気感応素子。[Claims] 1) A magnetostrictive amorphous alloy wire whose both ends are fixed on an insulating substrate and twisted in one direction along its entire length is provided with a plurality of direction reversing means for stretching the wire in a zigzag pattern. A magnetically sensitive element characterized by being provided with. 2) A magnetically sensitive element according to claim 1, wherein the direction reversing means is a pin embedded on the base. 3) A magnetically sensitive element according to claim 1, wherein the direction reversing means is a groove formed on a side surface of the base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6042386A JPS62215880A (en) | 1986-03-18 | 1986-03-18 | Magnetic responsive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6042386A JPS62215880A (en) | 1986-03-18 | 1986-03-18 | Magnetic responsive element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62215880A true JPS62215880A (en) | 1987-09-22 |
Family
ID=13141787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6042386A Pending JPS62215880A (en) | 1986-03-18 | 1986-03-18 | Magnetic responsive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62215880A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19953190A1 (en) * | 1999-11-05 | 2001-05-23 | Bosch Gmbh Robert | Absolute and incremental rotation angle measurement, especially for automotive application, using a star-shaped GMI (giant magneto impedance effect) sensor for measurement of the changing magnetic field produced by a rotating part |
-
1986
- 1986-03-18 JP JP6042386A patent/JPS62215880A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19953190A1 (en) * | 1999-11-05 | 2001-05-23 | Bosch Gmbh Robert | Absolute and incremental rotation angle measurement, especially for automotive application, using a star-shaped GMI (giant magneto impedance effect) sensor for measurement of the changing magnetic field produced by a rotating part |
| DE19953190C2 (en) * | 1999-11-05 | 2002-11-07 | Bosch Gmbh Robert | Sensor arrangement for detecting an angle of rotation |
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