JPS62243230A - Ｅ×ｂ速度選別器 - Google Patents

Ｅ×ｂ速度選別器

Info

Publication number
JPS62243230A
JPS62243230A JP61086294A JP8629486A JPS62243230A JP S62243230 A JPS62243230 A JP S62243230A JP 61086294 A JP61086294 A JP 61086294A JP 8629486 A JP8629486 A JP 8629486A JP S62243230 A JPS62243230 A JP S62243230A
Authority
JP
Japan
Prior art keywords
quadrupole
axis
charged
stage
charged beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61086294A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0523012B2 (de
Inventor
Yoshihiro Tamura
田村　好宏
Takao Kato
隆男 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP61086294A priority Critical patent/JPS62243230A/ja
Publication of JPS62243230A publication Critical patent/JPS62243230A/ja
Publication of JPH0523012B2 publication Critical patent/JPH0523012B2/ja
Granted legal-status Critical Current

Links

JP61086294A 1986-04-15 1986-04-15 Ｅ×ｂ速度選別器 Granted JPS62243230A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61086294A JPS62243230A (ja) 1986-04-15 1986-04-15 Ｅ×ｂ速度選別器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61086294A JPS62243230A (ja) 1986-04-15 1986-04-15 Ｅ×ｂ速度選別器

Publications (2)

Publication Number Publication Date
JPS62243230A true JPS62243230A (ja) 1987-10-23
JPH0523012B2 JPH0523012B2 (de) 1993-03-31

Family

ID=13882813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61086294A Granted JPS62243230A (ja) 1986-04-15 1986-04-15 Ｅ×ｂ速度選別器

Country Status (1)

Country Link
JP (1) JPS62243230A (de)

Also Published As

Publication number Publication date
JPH0523012B2 (de) 1993-03-31

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